Abstract:
This paper reports physics based TCAD simulations of multi-frequency C-V curves of In0.53Ga0.47As MOSCAPs including the AC response of the border traps. The calculations ...Show MoreMetadata
Abstract:
This paper reports physics based TCAD simulations of multi-frequency C-V curves of In0.53Ga0.47As MOSCAPs including the AC response of the border traps. The calculations reproduce the experimental inversion and accumulation capacitance versus frequency, and provide a means to profile the space and energy density of states of border traps. A sensitivity analysis of the results to border traps' distribution is carried out changing the trap volume and the oxide capacitance.
Published in: 2018 Joint International EUROSOI Workshop and International Conference on Ultimate Integration on Silicon (EUROSOI-ULIS)
Date of Conference: 19-21 March 2018
Date Added to IEEE Xplore: 07 May 2018
ISBN Information:
Electronic ISSN: 2472-9132
Tyndall National Institute University College Cork, Cork, Ireland
Tyndall National Institute University College Cork, Cork, Ireland
Tyndall National Institute University College Cork, Cork, Ireland
Tyndall National Institute University College Cork, Cork, Ireland
DPIA, University of Udine, Udine, Italy
Tyndall National Institute University College Cork, Cork, Ireland
Tyndall National Institute University College Cork, Cork, Ireland
Universita degli Studi di Udine, Udine, Friuli-Venezia Giulia, IT
Tyndall National Institute University College Cork, Cork, Ireland
DIEF, University of Modena and Reggio Emilia, Modena, Italy
Contents Tyndall National Institute University College Cork, Cork, Ireland
Tyndall National Institute University College Cork, Cork, Ireland
Tyndall National Institute University College Cork, Cork, Ireland
Tyndall National Institute University College Cork, Cork, Ireland
DPIA, University of Udine, Udine, Italy
Tyndall National Institute University College Cork, Cork, Ireland
Tyndall National Institute University College Cork, Cork, Ireland
Universita degli Studi di Udine, Udine, Friuli-Venezia Giulia, IT
Tyndall National Institute University College Cork, Cork, Ireland
DIEF, University of Modena and Reggio Emilia, Modena, Italy
