Comparison of On-Wafer Calibrations | IEEE Conference Publication | IEEE Xplore

Comparison of On-Wafer Calibrations


Abstract:

A powerful new verification technique determines the measurement accuracy of scattering parameter calibrations. The technique determines the relative reference impedance,...Show More

Abstract:

A powerful new verification technique determines the measurement accuracy of scattering parameter calibrations. The technique determines the relative reference impedance, reference plane offset, and the worst-case measurement deviations of any calibration from a benchmark calibration. The technique is applied to several popular on-wafer scattering parameter calibrations, and the deviations between those calibrations and the thru-reflect line calibration are quantified.
Date of Conference: 05-06 December 1991
Date Added to IEEE Xplore: 12 March 2007
ISBN Information:
Conference Location: San Diego, CA, USA
National Institute for Standards and Technology, Boulder, CO, USA
National Institute for Standards and Technology, Boulder, CO, USA
Cascade Microtech, Inc., Beaverton, OR, USA
Cornell University, USA

National Institute for Standards and Technology, Boulder, CO, USA
National Institute for Standards and Technology, Boulder, CO, USA
Cascade Microtech, Inc., Beaverton, OR, USA
Cornell University, USA

References

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