Silicon oxynitride (SiON) based waveguide for efficient guiding and emission of visible light.
Abstract:
We present monolithically integrated waveguide with thin isolated layers of dielectric material, which ensure efficient emission of guided light in multiple optical windo...Show MoreMetadata
Abstract:
We present monolithically integrated waveguide with thin isolated layers of dielectric material, which ensure efficient emission of guided light in multiple optical windows. The proposed waveguide is fabricated by using silicon oxynitride (SiON) which functions as the core guiding layer, and silicon nitride (SiN) which facilitates effective vertical emission of guided light via optical windows. The theoretical operating principle is analyzed by Finite-Difference-Time-Domain (FDTD) simulation, and the experimentally fabricated device is demonstrated to find the expected operational trend by measuring vertical emission of light through the optical windows. We further find that the physical origin of such efficient emission stems from the Fabry-Perot resonance induced laterally at the interface between the optical windows and cladding layers, which leads to the strong emission of light at the edge of optical windows. The output efficiencies of light emission from SiN optical windows, which are fabricated in cascaded fashion on top of the SiON waveguide, are 30, 45 and 55 percent at the wavelength of 457, 532, and 637 nm, respectively. The proposed design concept can be applied to various potential applications including optical integrated circuits with vertical interconnection, optical emission in wearable devices for virtual and augmented reality, and other emerging optical sensors.
Silicon oxynitride (SiON) based waveguide for efficient guiding and emission of visible light.
Published in: IEEE Access ( Volume: 10)
Funding Agency:
School of Electrical Engineering, Korea University, Seoul, Republic of Korea
Hyun Jin Jung was born in Asan, South Korea, in 1995. He received the B.S. degree in electrical engineering from Inha University, Incheon, South Korea, in 2020. He is currently pursuing the Ph.D. degree in electrical and electronic engineering with Korea University, Seoul, South Korea. His research interests include silicon based nanophotonic devices and optical waveguides.
Hyun Jin Jung was born in Asan, South Korea, in 1995. He received the B.S. degree in electrical engineering from Inha University, Incheon, South Korea, in 2020. He is currently pursuing the Ph.D. degree in electrical and electronic engineering with Korea University, Seoul, South Korea. His research interests include silicon based nanophotonic devices and optical waveguides.View more
School of Electrical Engineering, Korea University, Seoul, Republic of Korea
NAND Process Integration, SK Hynix, Icheon-si, Republic of Korea
Ui Seok Jung was born in Asan, South Korea, in 1984. He received the B.S. and Ph.D. degrees in electrical and electronic engineering from Korea University, Seoul, South Korea, in 2009 and 2021, respectively. He is currently an Engineer with the NAND Flash, SK Hynix. His research interest includes silicon optical modulator utilizing a schottky diode for optical interconnects based optical waveguides.
Ui Seok Jung was born in Asan, South Korea, in 1984. He received the B.S. and Ph.D. degrees in electrical and electronic engineering from Korea University, Seoul, South Korea, in 2009 and 2021, respectively. He is currently an Engineer with the NAND Flash, SK Hynix. His research interest includes silicon optical modulator utilizing a schottky diode for optical interconnects based optical waveguides.View more
Bionics Research Center, Korea Institute of Science and Technology (KIST), Seoul, Republic of Korea
Division of Bio-Medical Science and Technology, KIST School, University of Science and Technology (UST), Seoul, Republic of Korea
KHU-KIST Department of Converging Science and Technology, Kyung Hee University, Seoul, Republic of Korea
Byung Chul Lee (Member, IEEE) received the B.S. degree (summa cum laude) in electrical engineering from Korea University, in 2003, the M.S. degree in electrical engineering from the Korea Advanced Institute of Science and Technology (KAIST), in 2005, and the Ph.D. degree in electrical engineering from Stanford University, in 2015. He was a Research Scientist and a Senior Research Scientist at the Center for BioMicrosystem...Show More
Byung Chul Lee (Member, IEEE) received the B.S. degree (summa cum laude) in electrical engineering from Korea University, in 2003, the M.S. degree in electrical engineering from the Korea Advanced Institute of Science and Technology (KAIST), in 2005, and the Ph.D. degree in electrical engineering from Stanford University, in 2015. He was a Research Scientist and a Senior Research Scientist at the Center for BioMicrosystem...View more
School of Electrical Engineering, Korea University, Seoul, Republic of Korea
Soo Jin Kim received the B.S. degree from the Department of Electrical Engineering, Korea University, the M.S. and Ph.D. degrees in electrical engineering from Stanford University and performed Postdoctoral Research in materials science at Stanford University. He is currently an Associate Professor with the Department of Electrical Engineering, Korea University, Seoul, South Korea. His research interests include silicon p...Show More
Soo Jin Kim received the B.S. degree from the Department of Electrical Engineering, Korea University, the M.S. and Ph.D. degrees in electrical engineering from Stanford University and performed Postdoctoral Research in materials science at Stanford University. He is currently an Associate Professor with the Department of Electrical Engineering, Korea University, Seoul, South Korea. His research interests include silicon p...View more
Contents School of Electrical Engineering, Korea University, Seoul, Republic of Korea
Hyun Jin Jung was born in Asan, South Korea, in 1995. He received the B.S. degree in electrical engineering from Inha University, Incheon, South Korea, in 2020. He is currently pursuing the Ph.D. degree in electrical and electronic engineering with Korea University, Seoul, South Korea. His research interests include silicon based nanophotonic devices and optical waveguides.
Hyun Jin Jung was born in Asan, South Korea, in 1995. He received the B.S. degree in electrical engineering from Inha University, Incheon, South Korea, in 2020. He is currently pursuing the Ph.D. degree in electrical and electronic engineering with Korea University, Seoul, South Korea. His research interests include silicon based nanophotonic devices and optical waveguides.View more
School of Electrical Engineering, Korea University, Seoul, Republic of Korea
NAND Process Integration, SK Hynix, Icheon-si, Republic of Korea
Ui Seok Jung was born in Asan, South Korea, in 1984. He received the B.S. and Ph.D. degrees in electrical and electronic engineering from Korea University, Seoul, South Korea, in 2009 and 2021, respectively. He is currently an Engineer with the NAND Flash, SK Hynix. His research interest includes silicon optical modulator utilizing a schottky diode for optical interconnects based optical waveguides.
Ui Seok Jung was born in Asan, South Korea, in 1984. He received the B.S. and Ph.D. degrees in electrical and electronic engineering from Korea University, Seoul, South Korea, in 2009 and 2021, respectively. He is currently an Engineer with the NAND Flash, SK Hynix. His research interest includes silicon optical modulator utilizing a schottky diode for optical interconnects based optical waveguides.View more
Bionics Research Center, Korea Institute of Science and Technology (KIST), Seoul, Republic of Korea
Division of Bio-Medical Science and Technology, KIST School, University of Science and Technology (UST), Seoul, Republic of Korea
KHU-KIST Department of Converging Science and Technology, Kyung Hee University, Seoul, Republic of Korea
Byung Chul Lee (Member, IEEE) received the B.S. degree (summa cum laude) in electrical engineering from Korea University, in 2003, the M.S. degree in electrical engineering from the Korea Advanced Institute of Science and Technology (KAIST), in 2005, and the Ph.D. degree in electrical engineering from Stanford University, in 2015. He was a Research Scientist and a Senior Research Scientist at the Center for BioMicrosystems, Korea Institute of Science and Technology (KIST), Seoul, South Korea, from 2005 to 2021. He also joined as an Associate Professor at the KHU-KIST Department of Converging Science and Technology, Kyung Hee University, Seoul, in 2022. He is currently working as a Principal Research Scientist with the Bionics Research Center, KIST. He is also an Associate Professor with the Division of Bio-Medical Science and Technology, University of Science and Technology (UST), Seoul. His research interests include MEMS/NEMS technology for diverse biomedical applications such as bioelectronics, biosensors, micro-nanofluidics, micro-nanofabrications, and novel micromachined ultrasonic transducers and systems.
Byung Chul Lee (Member, IEEE) received the B.S. degree (summa cum laude) in electrical engineering from Korea University, in 2003, the M.S. degree in electrical engineering from the Korea Advanced Institute of Science and Technology (KAIST), in 2005, and the Ph.D. degree in electrical engineering from Stanford University, in 2015. He was a Research Scientist and a Senior Research Scientist at the Center for BioMicrosystems, Korea Institute of Science and Technology (KIST), Seoul, South Korea, from 2005 to 2021. He also joined as an Associate Professor at the KHU-KIST Department of Converging Science and Technology, Kyung Hee University, Seoul, in 2022. He is currently working as a Principal Research Scientist with the Bionics Research Center, KIST. He is also an Associate Professor with the Division of Bio-Medical Science and Technology, University of Science and Technology (UST), Seoul. His research interests include MEMS/NEMS technology for diverse biomedical applications such as bioelectronics, biosensors, micro-nanofluidics, micro-nanofabrications, and novel micromachined ultrasonic transducers and systems.View more
School of Electrical Engineering, Korea University, Seoul, Republic of Korea
Soo Jin Kim received the B.S. degree from the Department of Electrical Engineering, Korea University, the M.S. and Ph.D. degrees in electrical engineering from Stanford University and performed Postdoctoral Research in materials science at Stanford University. He is currently an Associate Professor with the Department of Electrical Engineering, Korea University, Seoul, South Korea. His research interests include silicon photonics and nanophotonics for optical device applications.
Soo Jin Kim received the B.S. degree from the Department of Electrical Engineering, Korea University, the M.S. and Ph.D. degrees in electrical engineering from Stanford University and performed Postdoctoral Research in materials science at Stanford University. He is currently an Associate Professor with the Department of Electrical Engineering, Korea University, Seoul, South Korea. His research interests include silicon photonics and nanophotonics for optical device applications.View more