Nano-Gap Contact MEMS Torsional Mode Acceleration Switch Wake-up Sensor

In this paper, a MEMS torsional mode acceleration switch is proposed for the detection of moderately low levels of acceleration. The torsional mode structure provides for a large displacement to close a switch with a lower acceleration threshold. A nano-gap vertical TiN contact was introduced to implement a stable switch contact. We demonstrate activation of the acceleration switch by a 15g acceleration input with a contact time that is sufficient to trigger electric circuitry. The proposed acceleration switch can be used as a wake-up sensor for zero-power Internet-of-Things nodes.