Abstract:
Interest in utilizing ultrasound (US) transducers for non-invasive neuromodulation treatment, including for low intensity transcranial focused ultrasound stimulation (tFU...Show MoreMetadata
Abstract:
Interest in utilizing ultrasound (US) transducers for non-invasive neuromodulation treatment, including for low intensity transcranial focused ultrasound stimulation (tFUS), has grown rapidly. The most widely demonstrated US transducers for tFUS are either bulk piezoelectric transducers or capacitive micromachine transducers (CMUT) which require high voltage excitation to operate. In order to advance the development of the US transducers towards small, portable devices for safe tFUS at large scale, a low voltage array of US transducers with beam focusing and steering capability is of interest. This work presents the design methodology, fabrication, and characterization of 32-element phased array piezoelectric micromachined ultrasound transducers (PMUT) using 1.5~\mu \text{m} thick Pb(Zr0.52Ti _{{\mathrm {0.48}}})\text{O}_{3} films doped with 2 mol% Nb. The electrode/piezoelectric/electrode stack was deposited on a silicon on insulator (SOI) wafer with a 2~\mu \text{m} silicon device layer that serves as the passive elastic layer for bending-mode vibration. The fabricated 32-element PMUT has a central frequency at 1.4 MHz. Ultrasound beam focusing and steering (through beamforming) was demonstrated where the array was driven with 14.6 V square unipolar pulses. The PMUT generated a maximum peak-to-peak focused acoustic pressure output of 0.44 MPa at a focal distance of 20 mm with a 9.2 mm and 1 mm axial and lateral resolution, respectively. The maximum pressure is equivalent to a spatial-peak pulse-average intensity of 1.29 W/cm2, which is suitable for tFUS application.
Published in: IEEE Open Journal of Ultrasonics, Ferroelectrics, and Frequency Control ( Volume: 2)
Funding Agency:
Department of Materials Science and Engineering and Materials Research Institute, The Pennsylvania State University, University Park, PA, USA
Pannawit Tipsawat (Graduate Student Member, IEEE) received B.S. (Hons.) and M.S. degrees in physics from the Suranaree University of Technology, Thailand, in 2016 and 2019, respectively. He is currently pursuing a Ph.D. degree in materials science and engineering with The Pennsylvania State University, University Park, PA, USA. In his bachelor’s degree, he focused on wet chemical synthesis; electrochemical characterizatio...Show More
Pannawit Tipsawat (Graduate Student Member, IEEE) received B.S. (Hons.) and M.S. degrees in physics from the Suranaree University of Technology, Thailand, in 2016 and 2019, respectively. He is currently pursuing a Ph.D. degree in materials science and engineering with The Pennsylvania State University, University Park, PA, USA. In his bachelor’s degree, he focused on wet chemical synthesis; electrochemical characterizatio...View more
Department of Electrical Engineering, The Pennsylvania State University, University Park, PA, USA
Sheikh Jawad Ilham (Graduate Student Member, IEEE) was born in Bangladesh in 1991. He received a degree from the Bangladesh University of Engineering and Technology, Bangladesh, and a master’s degree in biomedical engineering from the University of Connecticut, CT, USA, in 2018. He is currently pursuing the Ph.D. degree with the Integrated Circuits and Systems Laboratory (ICSL), The Pennsylvania State University, Universi...Show More
Sheikh Jawad Ilham (Graduate Student Member, IEEE) was born in Bangladesh in 1991. He received a degree from the Bangladesh University of Engineering and Technology, Bangladesh, and a master’s degree in biomedical engineering from the University of Connecticut, CT, USA, in 2018. He is currently pursuing the Ph.D. degree with the Integrated Circuits and Systems Laboratory (ICSL), The Pennsylvania State University, Universi...View more
Department of Materials Science and Engineering and Materials Research Institute, The Pennsylvania State University, University Park, PA, USA
Department of Electrical Engineering, The Pennsylvania State University, University Park, PA, USA
Zeinab Kashani (Graduate Student Member, IEEE) received a B.S. degree from the University of Tehran, Tehran, Iran, in 2012, and the M.Sc. degree in microelectronics from Tarbiat Modares University, Tehran, in 2015. She is currently pursuing a Ph.D. degree in electrical engineering with the Integrated Circuits and Systems Laboratory, The Pennsylvania State University, University Park, PA, USA. Her M.Sc. thesis was titled “...Show More
Zeinab Kashani (Graduate Student Member, IEEE) received a B.S. degree from the University of Tehran, Tehran, Iran, in 2012, and the M.Sc. degree in microelectronics from Tarbiat Modares University, Tehran, in 2015. She is currently pursuing a Ph.D. degree in electrical engineering with the Integrated Circuits and Systems Laboratory, The Pennsylvania State University, University Park, PA, USA. Her M.Sc. thesis was titled “...View more
Department of Electrical Engineering, The Pennsylvania State University, University Park, PA, USA
Mehdi Kiani (Senior Member, IEEE) received a B.S. degree from Shiraz University, Shiraz, Iran, in 2005, a M.S. degree from the Sharif University of Technology, Tehran, Iran, in 2008, and the M.S. and Ph.D. degrees in electrical and computer engineering from the Georgia Institute of Technology, Atlanta, GA, USA, in 2012 and 2013, respectively. In 2014, he joined the Faculty of the School of Electrical Engineering and Compu...Show More
Mehdi Kiani (Senior Member, IEEE) received a B.S. degree from Shiraz University, Shiraz, Iran, in 2005, a M.S. degree from the Sharif University of Technology, Tehran, Iran, in 2008, and the M.S. and Ph.D. degrees in electrical and computer engineering from the Georgia Institute of Technology, Atlanta, GA, USA, in 2012 and 2013, respectively. In 2014, he joined the Faculty of the School of Electrical Engineering and Compu...View more
Department of Materials Science and Engineering and Materials Research Institute, The Pennsylvania State University, University Park, PA, USA
Susan Trolier-Mckinstry (Fellow, IEEE) is an Evan Pugh University Professor and the Steward S. Flaschen Professor of ceramic science and engineering, and a Professor of electrical engineering with The Pennsylvania State University, University Park, PA, USA. She directs the Center for Dielectrics and Piezoelectrics and the Center for Three-Dimensional Ferroelectric Microelectronics. Her main research interests include thin...Show More
Susan Trolier-Mckinstry (Fellow, IEEE) is an Evan Pugh University Professor and the Steward S. Flaschen Professor of ceramic science and engineering, and a Professor of electrical engineering with The Pennsylvania State University, University Park, PA, USA. She directs the Center for Dielectrics and Piezoelectrics and the Center for Three-Dimensional Ferroelectric Microelectronics. Her main research interests include thin...View more
Contents Department of Materials Science and Engineering and Materials Research Institute, The Pennsylvania State University, University Park, PA, USA
Pannawit Tipsawat (Graduate Student Member, IEEE) received B.S. (Hons.) and M.S. degrees in physics from the Suranaree University of Technology, Thailand, in 2016 and 2019, respectively. He is currently pursuing a Ph.D. degree in materials science and engineering with The Pennsylvania State University, University Park, PA, USA. In his bachelor’s degree, he focused on wet chemical synthesis; electrochemical characterizations and, during his master’s degree, he conducted research on the point defect equilibria of cerium oxide systems. His current research interests focus on the design and fabrication of piezoelectric micromachined ultrasound transducers (PMUTs) and their application.
Pannawit Tipsawat (Graduate Student Member, IEEE) received B.S. (Hons.) and M.S. degrees in physics from the Suranaree University of Technology, Thailand, in 2016 and 2019, respectively. He is currently pursuing a Ph.D. degree in materials science and engineering with The Pennsylvania State University, University Park, PA, USA. In his bachelor’s degree, he focused on wet chemical synthesis; electrochemical characterizations and, during his master’s degree, he conducted research on the point defect equilibria of cerium oxide systems. His current research interests focus on the design and fabrication of piezoelectric micromachined ultrasound transducers (PMUTs) and their application.View more
Department of Electrical Engineering, The Pennsylvania State University, University Park, PA, USA
Sheikh Jawad Ilham (Graduate Student Member, IEEE) was born in Bangladesh in 1991. He received a degree from the Bangladesh University of Engineering and Technology, Bangladesh, and a master’s degree in biomedical engineering from the University of Connecticut, CT, USA, in 2018. He is currently pursuing the Ph.D. degree with the Integrated Circuits and Systems Laboratory (ICSL), The Pennsylvania State University, University Park, PA, USA. He conducted research on ultrasound neuromodulation on animal models during his master’s studies. His current research interests include analog and mixed mode circuits and implantable systems development for various biomedical applications (both therapeutic and diagnostic) with a special focus on ultrasound phased array systems.
Sheikh Jawad Ilham (Graduate Student Member, IEEE) was born in Bangladesh in 1991. He received a degree from the Bangladesh University of Engineering and Technology, Bangladesh, and a master’s degree in biomedical engineering from the University of Connecticut, CT, USA, in 2018. He is currently pursuing the Ph.D. degree with the Integrated Circuits and Systems Laboratory (ICSL), The Pennsylvania State University, University Park, PA, USA. He conducted research on ultrasound neuromodulation on animal models during his master’s studies. His current research interests include analog and mixed mode circuits and implantable systems development for various biomedical applications (both therapeutic and diagnostic) with a special focus on ultrasound phased array systems.View more
Department of Materials Science and Engineering and Materials Research Institute, The Pennsylvania State University, University Park, PA, USA
Department of Electrical Engineering, The Pennsylvania State University, University Park, PA, USA
Zeinab Kashani (Graduate Student Member, IEEE) received a B.S. degree from the University of Tehran, Tehran, Iran, in 2012, and the M.Sc. degree in microelectronics from Tarbiat Modares University, Tehran, in 2015. She is currently pursuing a Ph.D. degree in electrical engineering with the Integrated Circuits and Systems Laboratory, The Pennsylvania State University, University Park, PA, USA. Her M.Sc. thesis was titled “Design of a low phase noise mm-Wave quadrature VCO. ” From 2012 to 2018, she was a Programmer and an Electronic Circuit Designer, developing circuits and firmware for embedded systems, in medical instruments and smart wearable companies affiliated with the University of Tehran; and the Sharif University of Technology, Tehran. Her research interests include biomedical circuits and systems, ultrasound-based medical systems, analog, digital, mixed-signal, RF, and mm-Wave integrated circuits design.
Zeinab Kashani (Graduate Student Member, IEEE) received a B.S. degree from the University of Tehran, Tehran, Iran, in 2012, and the M.Sc. degree in microelectronics from Tarbiat Modares University, Tehran, in 2015. She is currently pursuing a Ph.D. degree in electrical engineering with the Integrated Circuits and Systems Laboratory, The Pennsylvania State University, University Park, PA, USA. Her M.Sc. thesis was titled “Design of a low phase noise mm-Wave quadrature VCO. ” From 2012 to 2018, she was a Programmer and an Electronic Circuit Designer, developing circuits and firmware for embedded systems, in medical instruments and smart wearable companies affiliated with the University of Tehran; and the Sharif University of Technology, Tehran. Her research interests include biomedical circuits and systems, ultrasound-based medical systems, analog, digital, mixed-signal, RF, and mm-Wave integrated circuits design.View more
Department of Electrical Engineering, The Pennsylvania State University, University Park, PA, USA
Mehdi Kiani (Senior Member, IEEE) received a B.S. degree from Shiraz University, Shiraz, Iran, in 2005, a M.S. degree from the Sharif University of Technology, Tehran, Iran, in 2008, and the M.S. and Ph.D. degrees in electrical and computer engineering from the Georgia Institute of Technology, Atlanta, GA, USA, in 2012 and 2013, respectively. In 2014, he joined the Faculty of the School of Electrical Engineering and Computer Science, The Pennsylvania State University, University Park, PA, USA. His research interests include the multidisciplinary areas of analog, mixed-signal, and power-management integrated circuits; wireless power; implantable medical devices; neural interfaces; and ultrasound-based medical systems. He currently serves as the Technical Program Committee (TPC) Member for the IEEE International Solid-State Circuits Conference (ISSCC). He also served as the TPC Member for the IEEE Custom Integrated Circuits Conference (CICC) and the IEEE Sensors Conference. He was the recipient of the 2020 NSF CAREER Award. He is currently an Associate Editor for IEEE Transactions on Biomedical Circuits and Systems and IEEE Transactions on Biomedical Engineering.
Mehdi Kiani (Senior Member, IEEE) received a B.S. degree from Shiraz University, Shiraz, Iran, in 2005, a M.S. degree from the Sharif University of Technology, Tehran, Iran, in 2008, and the M.S. and Ph.D. degrees in electrical and computer engineering from the Georgia Institute of Technology, Atlanta, GA, USA, in 2012 and 2013, respectively. In 2014, he joined the Faculty of the School of Electrical Engineering and Computer Science, The Pennsylvania State University, University Park, PA, USA. His research interests include the multidisciplinary areas of analog, mixed-signal, and power-management integrated circuits; wireless power; implantable medical devices; neural interfaces; and ultrasound-based medical systems. He currently serves as the Technical Program Committee (TPC) Member for the IEEE International Solid-State Circuits Conference (ISSCC). He also served as the TPC Member for the IEEE Custom Integrated Circuits Conference (CICC) and the IEEE Sensors Conference. He was the recipient of the 2020 NSF CAREER Award. He is currently an Associate Editor for IEEE Transactions on Biomedical Circuits and Systems and IEEE Transactions on Biomedical Engineering.View more
Department of Materials Science and Engineering and Materials Research Institute, The Pennsylvania State University, University Park, PA, USA
Susan Trolier-Mckinstry (Fellow, IEEE) is an Evan Pugh University Professor and the Steward S. Flaschen Professor of ceramic science and engineering, and a Professor of electrical engineering with The Pennsylvania State University, University Park, PA, USA. She directs the Center for Dielectrics and Piezoelectrics and the Center for Three-Dimensional Ferroelectric Microelectronics. Her main research interests include thin films for dielectric and piezoelectric applications. She is a member of the National Academy of Engineering, a fellow of the American Ceramic Society and the Materials Research Society, and an Academician of the World Academy of Ceramics. She currently serves as an Associate Editor for Applied Physics Letters.
Susan Trolier-Mckinstry (Fellow, IEEE) is an Evan Pugh University Professor and the Steward S. Flaschen Professor of ceramic science and engineering, and a Professor of electrical engineering with The Pennsylvania State University, University Park, PA, USA. She directs the Center for Dielectrics and Piezoelectrics and the Center for Three-Dimensional Ferroelectric Microelectronics. Her main research interests include thin films for dielectric and piezoelectric applications. She is a member of the National Academy of Engineering, a fellow of the American Ceramic Society and the Materials Research Society, and an Academician of the World Academy of Ceramics. She currently serves as an Associate Editor for Applied Physics Letters.View more