Abstract:
We demonstrate the working of a compact, fast, and efficient plasma cleaner that utilizes the intense plasma generated in a radio frequency (RF) plasma reactor with metal...Show MoreMetadata
Abstract:
We demonstrate the working of a compact, fast, and efficient plasma cleaner that utilizes the intense plasma generated in a radio frequency (RF) plasma reactor with metal electrodes. Our plasma cleaner’s effectiveness in cleaning substrates with different contaminants was studied and compared with a commercial plasma cleaner (HARRICK plasma PDC-32G-2) using optical imaging, water drop test and X-ray photoelectron spectroscopy (XPS). We used substrates contaminated with fingerprints, photoresist, and pump oil to study the cleaning performance of our plasma cleaner. Excellent substrate cleaning could be achieved in less than 2 min, which shows that the cleaning time is reduced by about 80% compared with the commercial plasma cleaner. The results also indicate that the cleaning performance is comparable or better than the commercial plasma cleaner, without even precleaning the substrates.
Published in: IEEE Transactions on Plasma Science ( Volume: 49, Issue: 11, November 2021)
Funding Agency:
School of Physics, Indian Institute of Science Education and Research Thiruvananthapuram, Thiruvananthapuram, Kerala, India
M. M. Devadevan was born in Thrissur, Kerala, India. He finished his high school education from Nirmala Matha Central School, Thrissur. He is currently pursuing the B.S. and M.S. dual degrees program with IISER Thiruvananthapuram, Thiruvananthapuram, India.
Mr. Devadevan was a recipient of the INSPIRE scholarship by the Department of Science and Technology, India.
M. M. Devadevan was born in Thrissur, Kerala, India. He finished his high school education from Nirmala Matha Central School, Thrissur. He is currently pursuing the B.S. and M.S. dual degrees program with IISER Thiruvananthapuram, Thiruvananthapuram, India.
Mr. Devadevan was a recipient of the INSPIRE scholarship by the Department of Science and Technology, India.View more
School of Physics, Indian Institute of Science Education and Research Thiruvananthapuram, Thiruvananthapuram, Kerala, India
J. Krishnanand was born in Thrissur, Kerala, India. He finished his high school education from Kulapati Munshi Bhavan’s Vidya Mandir Pottore, Thrissur. He is currently pursuing the B.S. and M.S. dual degrees program with IISER Thiruvananthapuram, Thiruvananthapuram, India.
Mr. Krishnanand was a recipient of the INSPIRE scholarship by the Department of Science and Technology, India.
J. Krishnanand was born in Thrissur, Kerala, India. He finished his high school education from Kulapati Munshi Bhavan’s Vidya Mandir Pottore, Thrissur. He is currently pursuing the B.S. and M.S. dual degrees program with IISER Thiruvananthapuram, Thiruvananthapuram, India.
Mr. Krishnanand was a recipient of the INSPIRE scholarship by the Department of Science and Technology, India.View more
School of Physics, Indian Institute of Science Education and Research Thiruvananthapuram, Thiruvananthapuram, Kerala, India
K. B. Shilpa was born in Palakkad, Kerala, India. She received the bachelor’s and master’s degrees in physics from the Government Victoria College, Palakkad, affiliated to the University of Calicut, Malappuram, India, in 2017 and 2019, respectively.
She is currently a Junior Research Fellow with IISER Thiruvananthapuram, Thiruvananthapuram, India. Her research interests include the Ultrafast dynamics of Perovskite material...Show More
K. B. Shilpa was born in Palakkad, Kerala, India. She received the bachelor’s and master’s degrees in physics from the Government Victoria College, Palakkad, affiliated to the University of Calicut, Malappuram, India, in 2017 and 2019, respectively.
She is currently a Junior Research Fellow with IISER Thiruvananthapuram, Thiruvananthapuram, India. Her research interests include the Ultrafast dynamics of Perovskite material...View more
School of Physics, Indian Institute of Science Education and Research Thiruvananthapuram, Thiruvananthapuram, Kerala, India
R. N. Kini was born in Kochi, Kerala, India. He received the B.Sc. degree in physics from Mahatma Gandhi University, Kottayam, India, the M.Sc. degree in physics from IIT Madras, Chennai, India, and the Ph.D. degree in physics from the University of Nottingham, Nottingham, U.K., in 1999, 2001, and 2005, respectively. He did the post-doctoral training at Virginia Tech, Blacksburg, VA, USA and the National Renewable Energy ...Show More
R. N. Kini was born in Kochi, Kerala, India. He received the B.Sc. degree in physics from Mahatma Gandhi University, Kottayam, India, the M.Sc. degree in physics from IIT Madras, Chennai, India, and the Ph.D. degree in physics from the University of Nottingham, Nottingham, U.K., in 1999, 2001, and 2005, respectively. He did the post-doctoral training at Virginia Tech, Blacksburg, VA, USA and the National Renewable Energy ...View more
Contents School of Physics, Indian Institute of Science Education and Research Thiruvananthapuram, Thiruvananthapuram, Kerala, India
M. M. Devadevan was born in Thrissur, Kerala, India. He finished his high school education from Nirmala Matha Central School, Thrissur. He is currently pursuing the B.S. and M.S. dual degrees program with IISER Thiruvananthapuram, Thiruvananthapuram, India.
Mr. Devadevan was a recipient of the INSPIRE scholarship by the Department of Science and Technology, India.
M. M. Devadevan was born in Thrissur, Kerala, India. He finished his high school education from Nirmala Matha Central School, Thrissur. He is currently pursuing the B.S. and M.S. dual degrees program with IISER Thiruvananthapuram, Thiruvananthapuram, India.
Mr. Devadevan was a recipient of the INSPIRE scholarship by the Department of Science and Technology, India.View more
School of Physics, Indian Institute of Science Education and Research Thiruvananthapuram, Thiruvananthapuram, Kerala, India
J. Krishnanand was born in Thrissur, Kerala, India. He finished his high school education from Kulapati Munshi Bhavan’s Vidya Mandir Pottore, Thrissur. He is currently pursuing the B.S. and M.S. dual degrees program with IISER Thiruvananthapuram, Thiruvananthapuram, India.
Mr. Krishnanand was a recipient of the INSPIRE scholarship by the Department of Science and Technology, India.
J. Krishnanand was born in Thrissur, Kerala, India. He finished his high school education from Kulapati Munshi Bhavan’s Vidya Mandir Pottore, Thrissur. He is currently pursuing the B.S. and M.S. dual degrees program with IISER Thiruvananthapuram, Thiruvananthapuram, India.
Mr. Krishnanand was a recipient of the INSPIRE scholarship by the Department of Science and Technology, India.View more
School of Physics, Indian Institute of Science Education and Research Thiruvananthapuram, Thiruvananthapuram, Kerala, India
K. B. Shilpa was born in Palakkad, Kerala, India. She received the bachelor’s and master’s degrees in physics from the Government Victoria College, Palakkad, affiliated to the University of Calicut, Malappuram, India, in 2017 and 2019, respectively.
She is currently a Junior Research Fellow with IISER Thiruvananthapuram, Thiruvananthapuram, India. Her research interests include the Ultrafast dynamics of Perovskite materials.
K. B. Shilpa was born in Palakkad, Kerala, India. She received the bachelor’s and master’s degrees in physics from the Government Victoria College, Palakkad, affiliated to the University of Calicut, Malappuram, India, in 2017 and 2019, respectively.
She is currently a Junior Research Fellow with IISER Thiruvananthapuram, Thiruvananthapuram, India. Her research interests include the Ultrafast dynamics of Perovskite materials.View more
School of Physics, Indian Institute of Science Education and Research Thiruvananthapuram, Thiruvananthapuram, Kerala, India
R. N. Kini was born in Kochi, Kerala, India. He received the B.Sc. degree in physics from Mahatma Gandhi University, Kottayam, India, the M.Sc. degree in physics from IIT Madras, Chennai, India, and the Ph.D. degree in physics from the University of Nottingham, Nottingham, U.K., in 1999, 2001, and 2005, respectively. He did the post-doctoral training at Virginia Tech, Blacksburg, VA, USA and the National Renewable Energy Laboratory, Golden, CO, USA.
He is currently an Associate Professor with the School of Physics, IISER Thiruvananthapuram, Thiruvananthapuram, India. His research activities span ultrafast and terahertz studies of different material systems, including semiconductors, layered materials, strongly correlated systems, and superlattices.
Dr. Kini is a Life Member of Indian Physics Association and Indian Laser Association. He has been awarded Kerala State Young Scientist Award (2014) by Kerala state council for science technology and Environment, India.
R. N. Kini was born in Kochi, Kerala, India. He received the B.Sc. degree in physics from Mahatma Gandhi University, Kottayam, India, the M.Sc. degree in physics from IIT Madras, Chennai, India, and the Ph.D. degree in physics from the University of Nottingham, Nottingham, U.K., in 1999, 2001, and 2005, respectively. He did the post-doctoral training at Virginia Tech, Blacksburg, VA, USA and the National Renewable Energy Laboratory, Golden, CO, USA.
He is currently an Associate Professor with the School of Physics, IISER Thiruvananthapuram, Thiruvananthapuram, India. His research activities span ultrafast and terahertz studies of different material systems, including semiconductors, layered materials, strongly correlated systems, and superlattices.
Dr. Kini is a Life Member of Indian Physics Association and Indian Laser Association. He has been awarded Kerala State Young Scientist Award (2014) by Kerala state council for science technology and Environment, India.View more
