Abstract:
The production of a wafer is a highly complex process with hundreds of individual, sequential process steps and thousands of parameters, where each of them can have an in...Show MoreMetadata
Abstract:
The production of a wafer is a highly complex process with hundreds of individual, sequential process steps and thousands of parameters, where each of them can have an influence on the final product. One approach for yield prediction before or during production is based on the divide-and-control principle. The individual process steps are considered independently and based on the analysis of these steps a prediction for the overall yield is calculated by a master system. In this article, a novel concept for predicting the yield is presented, which combines a cascading prediction algorithm, based on the sequential process steps, with an artificial intelligence (AI) focused master system. The system also proposes a recommended selection for optimal yield if the next process step can be executed on different machines/ chambers.
Date of Conference: 31 July 2020 - 01 August 2020
Date Added to IEEE Xplore: 29 September 2020
ISBN Information:
ISSN Information:
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- IEEE Keywords
- Index Terms
- Yield Prediction ,
- Semiconductor Industry ,
- Processing Steps ,
- Individual Steps ,
- Machine Learning ,
- Manufacturing Process ,
- Process Parameters ,
- Risk Of Failure ,
- Production Line ,
- Target Variable ,
- Technological Limitations ,
- State Machine ,
- Machine Control ,
- Set Of Machines ,
- Likelihood Of Failure ,
- Specific Machine ,
- Single-step Process ,
- Forecasting Ability
- Author Keywords
Keywords assist with retrieval of results and provide a means to discovering other relevant content. Learn more.
- IEEE Keywords
- Index Terms
- Yield Prediction ,
- Semiconductor Industry ,
- Processing Steps ,
- Individual Steps ,
- Machine Learning ,
- Manufacturing Process ,
- Process Parameters ,
- Risk Of Failure ,
- Production Line ,
- Target Variable ,
- Technological Limitations ,
- State Machine ,
- Machine Control ,
- Set Of Machines ,
- Likelihood Of Failure ,
- Specific Machine ,
- Single-step Process ,
- Forecasting Ability
- Author Keywords