Steady-State Model of an Argon–Helium High-Pressure Radio Frequency Dielectric Barrier Discharge

A steady-state kinetic model of argon-helium high-pressure radio frequency dielectric barrier discharge is developed using a simplified reaction rate package appropriate for pressures ranging from 200 to 500 torr. Electron production and loss rates are analyzed as a function of pressure and Ar-He mixture, highlighting the importance of the Ar₂^* dimer for higher pressures and Ar rich mixtures. As pressure increases, the primary ionization mechanism shifts between ionization of ground state Ar to dimer ionization, which affects the steady-state reduced electric field due to the electron energy required for the two dominant ionization mechanisms. The resulting reduced electric field profile controls the metastable Ar(1s₅) production, which, combined with the Ar(1s₅) loss rates, reveals the metastable density as a function of pressure and Ar-fraction. This simplified 0-D steady-state model shows close agreement with previous time-dependent simulations using a robust reaction rate package.