Abstract:
This paper presents a monolithic mechanically-bistable mechanism that does not rely on residual stress for its bistability. The bistable mechanism comprises two centrally...Show MoreMetadata
Abstract:
This paper presents a monolithic mechanically-bistable mechanism that does not rely on residual stress for its bistability. The bistable mechanism comprises two centrally-clamped parallel beams that have a curved shape but no residual stress after fabrication. Modal analysis and FEA simulation of the beams are used to predict and design the bistable behavior, and they agree well. Micro-scale mechanisms are fabricated by DRIE and their test results agree well with the theoretical and numerical predictions.
Published in: Technical Digest. MEMS 2001. 14th IEEE International Conference on Micro Electro Mechanical Systems (Cat. No.01CH37090)
Date of Conference: 25-25 January 2001
Date Added to IEEE Xplore: 07 August 2002
Print ISBN:0-7803-5998-4
Print ISSN: 1084-6999
Contents 