Abstract:
The applications of MEMS, micromachines or micro robots, to industrial inspections are investigated. Applications are classified by their uses and forms. The necessity of...Show MoreMetadata
Abstract:
The applications of MEMS, micromachines or micro robots, to industrial inspections are investigated. Applications are classified by their uses and forms. The necessity of MEMS is also described. Present research activities regarding maintenance area are surveyed, and a chain-type micromachine for the inspection of outer tube surfaces is introduced as an example. There are still a lot of problems for practical use, however, although there are lots of potential uses. Industrial inspection applications are expected to be one of the promising applications of MEMS followed by optical, RF, and power applications.
Published in: Technical Digest. MEMS 2001. 14th IEEE International Conference on Micro Electro Mechanical Systems (Cat. No.01CH37090)
Date of Conference: 25-25 January 2001
Date Added to IEEE Xplore: 07 August 2002
Print ISBN:0-7803-5998-4
Print ISSN: 1084-6999
Contents 