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A comparison between DCMS, HiPIMS and a novel ‘HiPIMS+Kick’ deposition for piezoelectric thin-films | IEEE Conference Publication | IEEE Xplore

A comparison between DCMS, HiPIMS and a novel ‘HiPIMS+Kick’ deposition for piezoelectric thin-films


Abstract:

High power impulse magnetron sputtering (HiPIMS) has been shown to improve optical and semi-conductor thin-film coatings through increased density [1], crystallinity and ...Show More

Abstract:

High power impulse magnetron sputtering (HiPIMS) has been shown to improve optical and semi-conductor thin-film coatings through increased density [1], crystallinity and more control over deposition parameters [2]. Here, HiPIMS and, a new technique, HiPIMS + `Kick' are investigated in relation to deposited piezoelectric coatings and compared with a standard DCMS coating. To assess improvements for acoustic generation, these films have been characterized using SEM and XRD techniques for material parameters, simulations have been done to model acoustic output and further work is to be done to find d33 parameters.
Date of Conference: 06-09 October 2019
Date Added to IEEE Xplore: 08 December 2019
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Conference Location: Glasgow, UK

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