Rapid Prototyping of MOX Gas Sensors in Form-Factor of SMD Packages | IEEE Conference Publication | IEEE Xplore
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Rapid Prototyping of MOX Gas Sensors in Form-Factor of SMD Packages

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N. Samotaev; K. Oblov; A. Ivanova; A. Gorshkova; B. Podlepetsky
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Abstract:

this work discusses the design of flexible laser micromilling technology for fast prototyping metal oxide based (MOX) gas sensors in SMD packages as a alternative to trad...Show More

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Abstract:

this work discusses the design of flexible laser micromilling technology for fast prototyping metal oxide based (MOX) gas sensors in SMD packages as a alternative to traditional silicon clean-room technologies. By laser micromilling technology possible to fabricate custom Micro Electro Mechanical System (MEMS) microhotplate platform and also SMD packages for MOX sensor, that gives complete solution for integration one in devices using IoT conception.
Published in: 2019 IEEE 31st International Conference on Microelectronics (MIEL)
Date of Conference: 16-18 September 2019
Date Added to IEEE Xplore: 04 November 2019
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ISSN Information:

DOI: 10.1109/MIEL.2019.8889576
Conference Location: Nis, Serbia
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