Abstract:
A vertical multilayer VO2 MEMS microactuator device is reported in this work. A 150-nm-thick VO2 layer is sandwiched between the top Pt and bottom indium tin oxide (ITO) ...Show MoreMetadata
Abstract:
A vertical multilayer VO2 MEMS microactuator device is reported in this work. A 150-nm-thick VO2 layer is sandwiched between the top Pt and bottom indium tin oxide (ITO) electrodes. An equivalent thermal circuit is developed with a thermal response time of 0.39 ms. With the insulator-to-metal phase transition of VO2 at ~68 °C accompanied by large electrical and lattice changes, a 35-μmlong VO2 actuator experiences 2-μm deflection across the phase transition driven by heating and 0.22-μm deflection when electrothermallyactuated.The COMSOL finite element analysis is performed to determine the spatial distribution of the current flow and temperature profile and to verify the experimental measurements of strain-induced bending in this multilayer vertical structure. The obtained experimental result shows a good fit with the simulation analysis, which can in future be used to develop a generic understanding of such vertical MEMS devices.
Published in: IEEE Transactions on Electron Devices ( Volume: 66, Issue: 10, October 2019)
Funding Agency:
School of Materials Engineering, School of Electrical and Computer Engineering, Purdue University, West Lafayette, IN, USA
School of Materials Engineering, School of Electrical and Computer Engineering, Purdue University, West Lafayette, IN, USA
School of Materials Engineering, School of Electrical and Computer Engineering, Purdue University, West Lafayette, IN, USA
School of Materials Engineering, School of Electrical and Computer Engineering, Purdue University, West Lafayette, IN, USA
Contents School of Materials Engineering, School of Electrical and Computer Engineering, Purdue University, West Lafayette, IN, USA
School of Materials Engineering, School of Electrical and Computer Engineering, Purdue University, West Lafayette, IN, USA
School of Materials Engineering, School of Electrical and Computer Engineering, Purdue University, West Lafayette, IN, USA
School of Materials Engineering, School of Electrical and Computer Engineering, Purdue University, West Lafayette, IN, USA
