Abstract:
Lead-free piezoelectric thin films made of 0.5(BaZr0.2Ti0.8O3)-0.5(Ba0.7Ca0.3O3) over Pt/TiOx/SiO2/Si were synthesized by means of repeated "green" chemical solution depo...Show MoreMetadata
Abstract:
Lead-free piezoelectric thin films made of 0.5(BaZr0.2Ti0.8O3)-0.5(Ba0.7Ca0.3O3) over Pt/TiOx/SiO2/Si were synthesized by means of repeated "green" chemical solution deposition routes with the use of non-toxic solvents. Characterization results of the morphology and ferroelectric behavior of the films are reported.
Date of Conference: 13-14 June 2019
Date Added to IEEE Xplore: 08 August 2019
ISBN Information: