0.5(BaZr0.2Ti0.8O3)-0.5(Ba0.7Ca0.3O3) thin films deriving from green sol-gel routes

Lead-free piezoelectric thin films made of 0.5(BaZr
0.2
Ti
0.8
O
3
)-0.5(Ba
0.7
Ca
0.3
O
3
) over Pt/TiO
x
/SiO
2
/Si were synthesized by means of repeated "green" chemical solution deposition routes with the use of non-toxic solvents. Characterization results of the morphology and ferroelectric behavior of the films are reported.