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The Characterization of Superconducting Tungsten Thin Films Deposited by DC Magnetron Sputtering | IEEE Conference Publication | IEEE Xplore

The Characterization of Superconducting Tungsten Thin Films Deposited by DC Magnetron Sputtering


Abstract:

In this paper, we studied on the nanometer tungsten (W) thin films deposited onto Si3N4/SiO2/Si substrates by DC magnetron sputtering. The morphologies, crystal structure...Show More

Abstract:

In this paper, we studied on the nanometer tungsten (W) thin films deposited onto Si3N4/SiO2/Si substrates by DC magnetron sputtering. The morphologies, crystal structures and components of W thin films with different thicknesses were investigated. The four-terminal electrodes structure was prepared by microfabrication technology and the electrical and superconducting properties of W thin films were measured. All results show that the W thin films are mainly composed of β-W under our experimental growth conditions. The superconducting transition temperature (Tc) of the W thin film with different thickness fluctuates from 1.15K to 1.65K.
Date of Conference: 24-26 November 2018
Date Added to IEEE Xplore: 30 December 2018
ISBN Information:
Conference Location: Shanghai, China

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