Abstract:
EOP (Electro Optical Probing) / EOFM (Electro Optical Frequency Mapping) is a dynamic optical probing technique widely used in IC level defect localization from backside....Show MoreMetadata
Abstract:
EOP (Electro Optical Probing) / EOFM (Electro Optical Frequency Mapping) is a dynamic optical probing technique widely used in IC level defect localization from backside. In this paper, a new method of EOP / EOFM application was discussed to enhance the amplitude and intensity of the EO data and image. One thermal EOP / EOFM experiment was performed to study the characteristic of thermal EO technique. And one real case was analyzed by the thermal EO technique.
Published in: 2018 IEEE International Symposium on the Physical and Failure Analysis of Integrated Circuits (IPFA)
Date of Conference: 16-19 July 2018
Date Added to IEEE Xplore: 02 September 2018
ISBN Information:
Electronic ISSN: 1946-1550
Contents 