Introduction
The fifth Generation (5G) of mobile communications is shaping out as a flexible infrastructure capable of handling the ever-increasing demand for mobile data. While the 5G standard is yet to be finalized, mm-wave frequency bands appear as best candidates to satisfy the insatiable demand for bandwidth. Based on the recommended frequency spectra for 5G at mm-wave, the 33 GHz band is selected in this brief due to its minimum atmospheric absorption. While necessarily addressing the tough 5G performance requirements, the upcoming transceivers must simultaneously focus on low cost, low footprint and low power consumption [1]. A fully integrated SoC solution addresses these challenges through tight monolithic integration of RF, analog and digital circuitry. This drives the implementation towards the ever more advanced CMOS technology nodes in order to benefit from the Moore’s law of scaling of area, power consumption and speed of digital logic. Recognizing these trends, this brief adopts an advanced 28-nm bulk CMOS technology in a quest to enable fully integrated mm-wave 5G SoC transceivers. In this brief, we take on (arguably) the most challenging building block, i.e., an LNA, and simultaneously focus on high-performance, low-area and low-power aspects, thus maximizing the relevant figure-of-merit (FoM), while solving numerous problems associated with this new technology adoption.
While certainly a boon for digital circuits, the 28 nm CMOS faces some new critical challenges in RF circuit design. Lower intrinsic gain of transistors translates into lower available LNA gain, although their gain efficiency gm/I typically remains higher. Furthermore, closer proximity of the back end-of-line (BEOL) stack to the lossy substrate and lower overall metal stack thickness in comparison with the dedicated RF-CMOS technologies add more parasitic losses, which manifest in lower quality (Q)-factors for inductors and transmission lines [2]. The latter necessitates precise modeling of passive components in addition to the active ones, and renders EM full-wave simulations an integral part of the circuit design.
In addition, as pointed out in [3], complicated design rules, especially tough metal density rules, which are much stricter than previously, cause considerable degradation of passive components. In order to satisfy the required minimum metal density, one needs to populate all passive structures, such as inductors and transmission lines, with dummy metal fills on all metal layers. The effects of these dummy fills on Q-factor as well as self-resonance frequency (SRF) of passive devices are investigated in this brief. It has to be strongly pointed out that the 33 GHz band of 5G is not yet high enough to enjoy benefits of small enough passive devices of >60GHz designs that can be largely free of the dummy metal fills. The feature size of surrounding areas of 33 GHz inductors and transformers is still relatively large compared to the maximum metal-free area allowed by the technology. Consequently, the relatively higher concentration of metal-filled regions aggravates design of high-quality passive components. Model inaccuracies in mm-wave and wider process variations are further challenges.
The advanced CMOS technology, however, can inherently benefit some aspects of RF designs. Noise contribution of transistors decreases as CMOS scales. This trend helps with the reduction of noise figure (NF) and overall design of LNAs. Specifically, lower device parasitics and corresponding high ft and fmax (410/230 GHz for core transistors) enable high-speed/frequency operation and extend it up to mm-wave [2], [4]. Associated reductions in power consumption and area result in denser, lower-cost and power-efficient circuits.
This brief introduces a compact 33-GHz LNA with 18.6 dB gain and 4.9 dB NF implemented in TSMC 1P9M 28-nm LP bulk CMOS technology. Section II discusses the circuit design and highlights active and passive component design and optimization. Section III reports the simulation and measurement results.
MM-Wave LNA Design in 28-nm CMOS
A. Millimeter-Wave Transistor Design
In order to accurately design mm-wave circuits for high-performance in 28 nm CMOS, the transistor layout has to be carefully implemented for reduced interconnect parasitics and optimum device sizes. Toward the former goal, the transistors use a double-sided gate contact to minimize gate resistance,which otherwise might impact noise and gain performance of the LNA. In addition, wide and short interconnects contact the drain and source regions, which immediately connect to the ultra-thick M9 layer.
Proper selection of finger width and drain current density can maximize the mm-wave transistor performance. In particular, this brief optimizes the transistor size/bias combinations by taking into account the cascode nature of LNA stages. Common-source (CS) and common-gate (CG) transistors feature the same size for subsequent analyses, as their non-unity ratio was noted to yield only marginal performance changes. As Fig. 1 demonstrates, a current density of
Simulated NFmin as a function of drain current density for 28 nm cascode transistors with drain and source PDK inductors at 33 GHz (Nf = 30).
Simulated fmax and fT of 28 nm cascode transistors as a function of JD = ID/W (VDS = 1.05 V, Nf = 30,
Simulated fmax as a function of Wf in 28-nm: (a) Single transistor, (b) cascode structure.
B. Circuit Design
The presented LNA comprises two stages, as shown in Fig. 4. Each stage employs a cascode topology owing to its better reverse isolation, higher gain and improved stability at mm- wave frequencies [5]. The drain-source interconnection of CS and CG transistors feature a series 69 pH inductor (
Simulated fT of the cascode structure as a function of LM: (a) Simulated schematic, (b) simulation results.
The input impedance
C. Design of Passive Components
Decreased BEOL thickness, closer proximity to the lossy Si substrate and highly restricted metal density rules of 28 nm CMOS make it all difficult to realize high-quality on-chip passive components, thus calling for their accurate design and optimization. Moreover, unsupported frequency range of PDK passive component models (qualified up to 20 GHz) and customized passive layouts make EM simulations an inherent part of the design.
The interconnects between the active and lumped passive components of the LNA employ a grounded coplanar waveguide (GCPW) topology, as illustrated in Fig. 6(a). These GCPW transmission lines use M9 for the signal trace and side ground planes. At the substrate interface, partially overlapping M1 and M2 strips act as a shield to avoid leakage of the EM fields into the lossy silicon substrate, thereby improving the Q-factor [7]. The side ground planes connect to the lowest metal layer through stacked vias from M1 to M9. M1 and M2 strips underneath the signal trace are left floating to prevent these highly resistive traces from acting as a current return path. Hence, the return current flows through the thick metal stack and cause negligible loss. The foundry rules necessitate a few modifications to the traditional GCPW structure: (i) side ground planes exhibit a slotted pattern, and (ii) connected fills from M1 to M8 increase the metal density while maximizing their distance to the signal trace as much as possible [7].
Designed GCPW transmission line: (a) Line geometry, (b) simulated attenuation constant, (c) characteristic impedance, (d) quality factor.
Passive components need to be modeled accurately at mm-wave to properly evaluate their parasitics and loss contributions, both of which have a pronounced impact on the circuit performance. In line with this goal, GCPW transmission lines, T-junctions, inductors and MOM capacitors are characterized with full-wave EM simulations, and are then optimized for maximum Q. Figs. 6(b)–(d) show simulated characteristics of the GCPW transmission line adopted in our design: The transmission line has a Q factor of 10.1, with an associated 0.74 dB/mm loss at 33 GHz. The same figure also compares these values to that of a traditional CPW: The lack of a shield and a metal stack arrangement, and random placement of automatically generated metal fills yield a worse Q of 8.2 at the same frequency, an observation justifying our modifications.
Accurate design of T-junctions is essential for low-loss connection of transmission line segments. Therefore, an optimized unit GCPW T-junction layout was designed to minimize the insertion and return losses. GCPW T-junctions TJ2 and TJ4 at the drain connections of M2 and M4 have considerable effect on the overall gain. The optimized TJ2 and TJ4 junctions present insertion losses of 0.3 dB and 0.2 dB, respectively, compared to ideal wire connections. It should be noted that TJ2 and TJ4 also contribute to the drain inductance of M2 and M4, and these contributions are accounted for during the design of LD1 and LD2.
Since this technology PDK does not have any high-Q Metal-Insulator-Metal (MIM) capacitors, MOM capacitors which are optimized for maximum Q are employed instead. A large number of parallel short fingers as well as parallel metal layers maximize the capacitance density and help reduce the parasitic series resistance. Q factor of
Fig. 7 shows the geometry and simulated characteristics of a typical inductor (LD2) employed in the LNA design for different fill scenarios. As the inset of Fig. 7(b) illustrates, the manually filled inductor employs the ultra-thick M9 layer for the coil and a guard ring on M1 similar to the PDK-supplied one. It features a dense arrangement of manually generated metal fills (over M1 to M7 inside the coil, and M1 to M9 outside) to avoid DRC errors. Fig. 7(a) depicts the same inductor without any filling (w/o fill) and with automatically generated top-level filling (auto-fill). Full-wave simulations show a Q of 18.0 at 33 GHz for the coil itself without any fills. Manual metal fills decrease Q to 15.8, whereas automatically generated dummy fills reduce this further down to 13.0 at 33 GHz. EM-aware placement of manual fills helps to mitigate Q factor degradation compared to the quasi-random placement of auto-fill generator which furthermore aims a more aggressive metal density in general. The remaining inductors of the LNA are similarly optimized with EM simulations, and their quality factors are reported in Fig. 4. The spacing between inductors and proximity to nearby devices are also investigated to allow for a compact and DRC-compliant layout with negligible mutual coupling effects.
In order to suppress the parasitic inductance and resistance of the interconnects leading to VDD I/O pads of both LNA stages, a proper combination of de-coupling capacitors is employed. Since SRF of MOM capacitors decreases for high capacitance values, a parallel combination of low-capacitance MOM capacitor units is used instead for a de-coupling capacitance of 10–20 pF with a high SRF to mitigate wirebond parasitics of dc I/O pads.
LNA Simulation and Measurement Results
The LNA circuit design is finalized following the integration of full-wave characterized passives and subsequent tuning. Simulated S-parameters of the complete LNA are shown in Fig. 9. The gain plot reveals a peak of 21.1 dB at 33 GHz, and a 3-dB bandwidth of 4.4 GHz. Return losses are better than 10 dB in the same band. Figs. 10(a) and 11 plot the simulated
Measured LNA stability and linearity: (a) Stability factors, (b) compression characteristics at 33 GHz.
The LNA is fabricated in TSMC 1P9M 28 nm LP bulk CMOS. Fig. 8 shows a micrograph of the assembled chip, which occupies a core area of
Linearity measurements are conducted with the power sweep function of E8361A PNA. Fig. 10(b) reproduces compression measurements at 33 GHz, and demonstrates that measured IP1dB of −25.5 dBm is in agreement with simulations.
The noise figure is measured with the Y-factor method using R&S FSW85 spectrum analyzer and Keysight Q347B noise source in a Faraday cage. An external LNA (HMC1040LP3CE) is used as a pre-amplifier right before FSW85 to reduce measurement uncertainty. The NF measurement setup is illustrated in Fig. 11(a). Measured noise figure is 4.90±0.22 dB at 34 GHz as plotted in Fig. 11(b).
Table I summarizes the performance of the implemented LNA, and compares it with state-of-the-art mm-wave CMOS designs. We use the following FOM expressions to weigh different aspects of these designs:\begin{align*}&FOM_{1} (conv.) = \frac {Gain[abs]\times 1000}{(F-1)[abs]\times P_{DC} [mW]} (\left ({Watt}\right)^{-1})\tag{1}\\&FOM_{2} = \frac {FOM(conv.)\times ({BW/f_{0} })}{(CoreArea[mm^{2}]\times f_{\max } [GHz])} (\left ({Watt\times mm^{2} \times GHz}\right)^{-1}) \\ \tag{2}\\&FOM_{3} = \frac {FOM(conv.)}{(CoreArea[mm^{2}]\times f_{\max } [GHz])} (\left ({Watt\times mm^{2} \times GHz}\right)^{-1}) \\\tag{3}{}\end{align*}
Conclusion
This brief is the first report of a 33-GHz LNA fabricated in the advanced but challenging 28-nm CMOS. All passive components of transmission lines, inductors and pads are designed and optimized with full wave simulations to cope with the strict metal density rules and other mentioned BEOL challenges of the technology for a satisfactory mm-wave performance. The fabricated LNA demonstrates high FOM while consuming less power and area compared to state-of-the-art, which makes it more applicable for 5G communications.
ACKNOWLEDGMENT
The authors thank Iran National Science Foundation (INSF) for scholarship, MCCI and Analog Devices for indirect support, EMX for software license, TSMC for University Shuttle chip fabrication, and Hsieh-Hung Hsieh for discussions.