A spatial moments sub-pixel edge detector with edge blur compensation for imaging metrology | IEEE Conference Publication | IEEE Xplore

A spatial moments sub-pixel edge detector with edge blur compensation for imaging metrology


Abstract:

In contactless metrology sub-pixel edge detectors allow for high precision dimensional measurements of lengths and positions of objects. Several classes of detectors exis...Show More

Abstract:

In contactless metrology sub-pixel edge detectors allow for high precision dimensional measurements of lengths and positions of objects. Several classes of detectors exist with various assumptions about the edge model and different requirements on computational resources. Moment-based detectors are fast to compute and offer potential for parallelisation. However, being based on a step-edge model, moment based detectors often introduce systematic errors with blur from diffraction or defocus. In this paper, the performance of the 1D spatial moments detector is analysed under influence of Gaussian blur and an error correction term is proposed, reducing measurement errors for blurred images by factors of 2-7.
Date of Conference: 14-17 May 2018
Date Added to IEEE Xplore: 12 July 2018
ISBN Information:
Conference Location: Houston, TX, USA

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