On the measuring circuit of piezoelectric accelerometers

Due to its excellent dynamic performance for vibration measurement, MEMS-based piezoelectric accelerometer has been studied in recent years. Piezoelectric micro-accelerometer can be regarded as a component that can produce electric charge with high internal impedance, but the quantity of electric charge is very subtle. By taking this into account, the general measuring circuit does not meet the requirement. In this paper, a charge amplifier with an integrated chip is used instead of a large number of discrete components, and cold-discharge design is also included to decrease the thermal noise of the whole circuit.