Impact Statement:With demand increasing for higher performance optical modulators, a necessary factor to improve is power dissipation. In this paper, we analyze the modulators thermal eff...Show More
Abstract:
We report on thermally tunable modulators, with efficiencies up to 2.16 nm/mW. Efficient performance was accomplished through integrated heater design and Si substrate re...Show MoreMetadata
Impact Statement:
With demand increasing for higher performance optical modulators, a necessary factor to improve is power dissipation. In this paper, we analyze the modulators thermal efficiency when the Si substrate is removed, in comparison to standard devices where substrate is left untouched, in two heater types. No such publication is known that compares variations of both heater types, substrate location, and parameterized modeling to understand the benefit substrate removal has on modulator performance.
Abstract:
We report on thermally tunable modulators, with efficiencies up to 2.16 nm/mW. Efficient performance was accomplished through integrated heater design and Si substrate removal, where the heavily N+ doped Si heater element is integrated into the body of the microdisk. For comparison, modulators with an external heater design were also tested with small diameter Si substrate removed. The external heavily doped N+Si heater bars were fabricated outside the diameter of the microdisk. Efficiency for external heater design was 0.68 nm/mW with substrate removed. Both types of thermal modulators were experimentally tested and simulated for a complete understanding of the Si substrate's influence on heat dissipation with both types benefiting significantly from substrate removal. Agreement between simulation and experimental results was greater than 80% in all instances.
Published in: IEEE Photonics Journal ( Volume: 10, Issue: 3, June 2018)