Abstract:
A novel thin-film-transistor (TFT)-based microsystem array derived from flat panel technology has been developed for functional extracellular neural stimulation and recor...Show MoreMetadata
Abstract:
A novel thin-film-transistor (TFT)-based microsystem array derived from flat panel technology has been developed for functional extracellular neural stimulation and recording. These arrays are microfabricated to meet the needs of optical transparency and extremely high density of electrodes with a large sensor area over 25 mm x 27 mm. Indium tin oxide has been used for surface electrode fabrication with the pitches of 50 and 100 μm and an optical transparency of ~95%. Each individual electrode is controlled through transistor drain voltage. The array consists of 30000 transistors over 243.75 mm2 chip area. The device has an extra extra high dot per inch (extra extra high density) resolution of 359.2 PPI (pixels per inch) or 7.07 x 10-4 mm dot pitch. The durability of the stimulated electrodes is extremely high, lasting more than one billion pulses without failure in dry as well as wet environments. Primary neuron cell cultures were established inside the polydimethylsiloxane chamber on the TFT substrate. Extracellular electrical signals were successfully recorded for both the currentand voltage-type stimulations. The binary presence of cells in a given region was achieved by means of impedance measurement.
Published in: Journal of Microelectromechanical Systems ( Volume: 27, Issue: 3, June 2018)
Funding Agency:
Research Center for Advanced Science and Technology, The University of Tokyo, Tokyo, Japan
Faruk Azam Shaik (M’17) received the B.Tech. degree in electronics and communication engineering from Jawaharlal Nehru Technological University, Hyderabad, India, in 2011, and the M.Tech. degree in biomedical engineering from IIT Hyderabad, Hyderabad, in 2015.
He is currently pursuing the Ph.D. degree in electrical engineering with The University of Tokyo, Tokyo, Japan. His research interests include bio-microelectromechan...Show More
Faruk Azam Shaik (M’17) received the B.Tech. degree in electronics and communication engineering from Jawaharlal Nehru Technological University, Hyderabad, India, in 2011, and the M.Tech. degree in biomedical engineering from IIT Hyderabad, Hyderabad, in 2015.
He is currently pursuing the Ph.D. degree in electrical engineering with The University of Tokyo, Tokyo, Japan. His research interests include bio-microelectromechan...View more
Research Center for Advanced Science and Technology, The University of Tokyo, Tokyo, Japan
Grant Alexander Cathcart (M’15) received the B.S. degree in electrical engineering from Rice University, Houston, TX, USA, in 2011, and the master’s degree in electrical engineering from The University of Tokyo, Tokyo, Japan, in 2016.
He is currently pursuing the Ph.D. degree in electrical engineering with The University of Tokyo. From 2009 to 2012, he was a Research Assistant with the United States Naval Research Laborato...Show More
Grant Alexander Cathcart (M’15) received the B.S. degree in electrical engineering from Rice University, Houston, TX, USA, in 2011, and the master’s degree in electrical engineering from The University of Tokyo, Tokyo, Japan, in 2016.
He is currently pursuing the Ph.D. degree in electrical engineering with The University of Tokyo. From 2009 to 2012, he was a Research Assistant with the United States Naval Research Laborato...View more
Institute of Industrial Science, The University of Tokyo, Tokyo, Japan
Satoshi Ihida received the B.E. degree from the Department of Metallurgy, The University of Tokyo, Tokyo, Japan, in 1990. He joined NEC Corporation, Japan, in 1990, where he focused on liquid crystals. Since 2003, he has been with Sharp Corporation, Japan, where he has been focusing on liquid crystals. Since 2012, he has been a Private Sector Collaborative Researcher with the Institute of Industrial Science, The Universit...Show More
Satoshi Ihida received the B.E. degree from the Department of Metallurgy, The University of Tokyo, Tokyo, Japan, in 1990. He joined NEC Corporation, Japan, in 1990, where he focused on liquid crystals. Since 2003, he has been with Sharp Corporation, Japan, where he has been focusing on liquid crystals. Since 2012, he has been a Private Sector Collaborative Researcher with the Institute of Industrial Science, The Universit...View more
Institute of Industrial Science, The University of Tokyo, Tokyo, Japan
Yoshiho Ikeuchi received the Ph.D. degree in engineering from the Department of Chemistry and Biotechnology, The University of Tokyo, Japan, in 2007. He was a Research Fellow with the Harvard Medical School from 2007 to 2013 and a Staff Scientist with Washington University in St. Louis from 2013 to 2014, where he performed research. Since 2014, he has been a Lecturer with the Institute of Industrial Science, The Universit...Show More
Yoshiho Ikeuchi received the Ph.D. degree in engineering from the Department of Chemistry and Biotechnology, The University of Tokyo, Japan, in 2007. He was a Research Fellow with the Harvard Medical School from 2007 to 2013 and a Staff Scientist with Washington University in St. Louis from 2013 to 2014, where he performed research. Since 2014, he has been a Lecturer with the Institute of Industrial Science, The Universit...View more
Research Center for Advanced Science and Technology, The University of Tokyo, Tokyo, Japan
Agnès Tixier-Mita (M’11) was born in Bourg-la-Reine, France, in 1970. She received the B.S. and M.S. degrees in material sciences from the École nationale supérieure d’ingénieurs de Caen, University of Caen Normandy, France, in 1994, and the Ph.D. degree from the University of Lille I, France, in 1998.
She then joined the LIMMS-CNRS/IIS, The University of Tokyo, in 1999, where she held a post-doctoral position in the field...Show More
Agnès Tixier-Mita (M’11) was born in Bourg-la-Reine, France, in 1970. She received the B.S. and M.S. degrees in material sciences from the École nationale supérieure d’ingénieurs de Caen, University of Caen Normandy, France, in 1994, and the Ph.D. degree from the University of Lille I, France, in 1998.
She then joined the LIMMS-CNRS/IIS, The University of Tokyo, in 1999, where she held a post-doctoral position in the field...View more
Research Center for Advanced Science and Technology, The University of Tokyo, Tokyo, Japan
Hiroshi Toshiyoshi (M’97) received the M.E. and Ph.D. degrees in electrical engineering from The University of Tokyo, Tokyo, Japan, in 1993 and 1996, respectively. He joined the Institute of Industrial Science, The University of Tokyo, as a Lecturer, in 1996. From 1999 to 2001, he was a Visiting Assistant Professor with the University of California, Los Angeles, CA, USA. In 2002, he became an Associate Professor with the ...Show More
Hiroshi Toshiyoshi (M’97) received the M.E. and Ph.D. degrees in electrical engineering from The University of Tokyo, Tokyo, Japan, in 1993 and 1996, respectively. He joined the Institute of Industrial Science, The University of Tokyo, as a Lecturer, in 1996. From 1999 to 2001, he was a Visiting Assistant Professor with the University of California, Los Angeles, CA, USA. In 2002, he became an Associate Professor with the ...View more
Contents Research Center for Advanced Science and Technology, The University of Tokyo, Tokyo, Japan
Faruk Azam Shaik (M’17) received the B.Tech. degree in electronics and communication engineering from Jawaharlal Nehru Technological University, Hyderabad, India, in 2011, and the M.Tech. degree in biomedical engineering from IIT Hyderabad, Hyderabad, in 2015.
He is currently pursuing the Ph.D. degree in electrical engineering with The University of Tokyo, Tokyo, Japan. His research interests include bio-microelectromechanical systems and microfluidics.
Faruk Azam Shaik (M’17) received the B.Tech. degree in electronics and communication engineering from Jawaharlal Nehru Technological University, Hyderabad, India, in 2011, and the M.Tech. degree in biomedical engineering from IIT Hyderabad, Hyderabad, in 2015.
He is currently pursuing the Ph.D. degree in electrical engineering with The University of Tokyo, Tokyo, Japan. His research interests include bio-microelectromechanical systems and microfluidics.View more
Research Center for Advanced Science and Technology, The University of Tokyo, Tokyo, Japan
Grant Alexander Cathcart (M’15) received the B.S. degree in electrical engineering from Rice University, Houston, TX, USA, in 2011, and the master’s degree in electrical engineering from The University of Tokyo, Tokyo, Japan, in 2016.
He is currently pursuing the Ph.D. degree in electrical engineering with The University of Tokyo. From 2009 to 2012, he was a Research Assistant with the United States Naval Research Laboratory, Washington, DC, USA. His research interests include bio-microelectromechanical systems, impedance spectroscopy, and cellular analysis.
Grant Alexander Cathcart (M’15) received the B.S. degree in electrical engineering from Rice University, Houston, TX, USA, in 2011, and the master’s degree in electrical engineering from The University of Tokyo, Tokyo, Japan, in 2016.
He is currently pursuing the Ph.D. degree in electrical engineering with The University of Tokyo. From 2009 to 2012, he was a Research Assistant with the United States Naval Research Laboratory, Washington, DC, USA. His research interests include bio-microelectromechanical systems, impedance spectroscopy, and cellular analysis.View more
Institute of Industrial Science, The University of Tokyo, Tokyo, Japan
Satoshi Ihida received the B.E. degree from the Department of Metallurgy, The University of Tokyo, Tokyo, Japan, in 1990. He joined NEC Corporation, Japan, in 1990, where he focused on liquid crystals. Since 2003, he has been with Sharp Corporation, Japan, where he has been focusing on liquid crystals. Since 2012, he has been a Private Sector Collaborative Researcher with the Institute of Industrial Science, The University of Tokyo. His research interests include thin-film transistors and their applications in microelectromechanical systems.
Satoshi Ihida received the B.E. degree from the Department of Metallurgy, The University of Tokyo, Tokyo, Japan, in 1990. He joined NEC Corporation, Japan, in 1990, where he focused on liquid crystals. Since 2003, he has been with Sharp Corporation, Japan, where he has been focusing on liquid crystals. Since 2012, he has been a Private Sector Collaborative Researcher with the Institute of Industrial Science, The University of Tokyo. His research interests include thin-film transistors and their applications in microelectromechanical systems.View more
Institute of Industrial Science, The University of Tokyo, Tokyo, Japan
Yoshiho Ikeuchi received the Ph.D. degree in engineering from the Department of Chemistry and Biotechnology, The University of Tokyo, Japan, in 2007. He was a Research Fellow with the Harvard Medical School from 2007 to 2013 and a Staff Scientist with Washington University in St. Louis from 2013 to 2014, where he performed research. Since 2014, he has been a Lecturer with the Institute of Industrial Science, The University of Tokyo. His research interests include the development of morphology and connections of neurons in the nervous system.
Yoshiho Ikeuchi received the Ph.D. degree in engineering from the Department of Chemistry and Biotechnology, The University of Tokyo, Japan, in 2007. He was a Research Fellow with the Harvard Medical School from 2007 to 2013 and a Staff Scientist with Washington University in St. Louis from 2013 to 2014, where he performed research. Since 2014, he has been a Lecturer with the Institute of Industrial Science, The University of Tokyo. His research interests include the development of morphology and connections of neurons in the nervous system.View more
Research Center for Advanced Science and Technology, The University of Tokyo, Tokyo, Japan
Agnès Tixier-Mita (M’11) was born in Bourg-la-Reine, France, in 1970. She received the B.S. and M.S. degrees in material sciences from the École nationale supérieure d’ingénieurs de Caen, University of Caen Normandy, France, in 1994, and the Ph.D. degree from the University of Lille I, France, in 1998.
She then joined the LIMMS-CNRS/IIS, The University of Tokyo, in 1999, where she held a post-doctoral position in the field of biomicroelectromechanical systems for two-years. She was an Assistant Researcher and an Assistant Professor at IIS, The University of Tokyo, in 2010. She has also been affiliated with the RCAST, The University of Tokyo, since 2010.
She has authored over 100 articles and holds two patents. Her research interests include integrated sensor-array devices for biological (cells analyses) and chemical applications (electronic nose), based on CMOS and thin-film-transistor technologies.
Agnès Tixier-Mita (M’11) was born in Bourg-la-Reine, France, in 1970. She received the B.S. and M.S. degrees in material sciences from the École nationale supérieure d’ingénieurs de Caen, University of Caen Normandy, France, in 1994, and the Ph.D. degree from the University of Lille I, France, in 1998.
She then joined the LIMMS-CNRS/IIS, The University of Tokyo, in 1999, where she held a post-doctoral position in the field of biomicroelectromechanical systems for two-years. She was an Assistant Researcher and an Assistant Professor at IIS, The University of Tokyo, in 2010. She has also been affiliated with the RCAST, The University of Tokyo, since 2010.
She has authored over 100 articles and holds two patents. Her research interests include integrated sensor-array devices for biological (cells analyses) and chemical applications (electronic nose), based on CMOS and thin-film-transistor technologies.View more
Research Center for Advanced Science and Technology, The University of Tokyo, Tokyo, Japan
Hiroshi Toshiyoshi (M’97) received the M.E. and Ph.D. degrees in electrical engineering from The University of Tokyo, Tokyo, Japan, in 1993 and 1996, respectively. He joined the Institute of Industrial Science, The University of Tokyo, as a Lecturer, in 1996. From 1999 to 2001, he was a Visiting Assistant Professor with the University of California, Los Angeles, CA, USA. In 2002, he became an Associate Professor with the Institute of Industrial Science, The University of Tokyo. From 2005 to 2008, he was the Project Leader of the Optomechatronics Project with the Kanagawa Academy of Science and Technology, Kawasaki, Japan. Since 2009, he has been a Professor with the Research Center for Advanced Science and Technology, The University of Tokyo. His research interests include optical and RF microelectromechanical systems.
Hiroshi Toshiyoshi (M’97) received the M.E. and Ph.D. degrees in electrical engineering from The University of Tokyo, Tokyo, Japan, in 1993 and 1996, respectively. He joined the Institute of Industrial Science, The University of Tokyo, as a Lecturer, in 1996. From 1999 to 2001, he was a Visiting Assistant Professor with the University of California, Los Angeles, CA, USA. In 2002, he became an Associate Professor with the Institute of Industrial Science, The University of Tokyo. From 2005 to 2008, he was the Project Leader of the Optomechatronics Project with the Kanagawa Academy of Science and Technology, Kawasaki, Japan. Since 2009, he has been a Professor with the Research Center for Advanced Science and Technology, The University of Tokyo. His research interests include optical and RF microelectromechanical systems.View more
