Abstract:
In this paper an overview of the sheet resistance and resistivity measurements employing the split post and single post dielectric resonator technique is presented. In th...Show MoreMetadata
Abstract:
In this paper an overview of the sheet resistance and resistivity measurements employing the split post and single post dielectric resonator technique is presented. In the theoretical part basic principles of measurements are described with assessment of the accuracy of measurements. In the experimental part results of measurements of several materials are presented including metals, semiconductors and superconductors. Sheet resistance/resistivity mapping results based on dielectric resonator heads are presented.
Date of Conference: 20-22 September 2017
Date Added to IEEE Xplore: 08 January 2018
ISBN Information:
Contents 