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High sensitivity magnetic sensors compatible with bulk silicon and SOI IC technology | IEEE Conference Publication | IEEE Xplore

High sensitivity magnetic sensors compatible with bulk silicon and SOI IC technology


Abstract:

This paper presents state of the art split drain current magnetic sensors fully compatible with the bulk silicon and SOI technology. While lateral double-diffused magneti...Show More

Abstract:

This paper presents state of the art split drain current magnetic sensors fully compatible with the bulk silicon and SOI technology. While lateral double-diffused magnetic sensitive MOSFET with integrated n-type Hall plate exhibits an order of magnitude higher relative current magnetic sensitivity compering with the conventional split drain silicon MagFETs, novel dual-gate four-terminal magnetic sensor brings a step-change in the integrated magnetic sensor's performance. Finally, a potential of GaN split current magnetic sensitive HEMT has been discussed.
Date of Conference: 09-11 October 2017
Date Added to IEEE Xplore: 14 December 2017
ISBN Information:
Electronic ISSN: 2159-1679
Conference Location: Nis, Serbia

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