Atmospheric Pressure Planar Radio Frequency Discharge With Isolated Electrodes: Glow Features and Application Prospects

Operation characteristics of RF planar barrier discharge in atmospheric pressure argon appropriate for obtaining the discharge extension outside the electrodes in a form of planar plasma jet are determined experimentally. The plasma jet images and spatial distributions of its light emission intensity are presented, and their features are discussed. The prospects of studied jet discharge for creation of liquid crystal alignment and etching polymer materials are demonstrated.