Abstract:
A hybrid fin/planar lateral double-diffused MOSFET (LDMOS) design (hybrid FET) is proposed for the high-voltage input-output devices in a FinFETbased system-on-chip (SoC)...Show MoreMetadata
Abstract:
A hybrid fin/planar lateral double-diffused MOSFET (LDMOS) design (hybrid FET) is proposed for the high-voltage input-output devices in a FinFETbased system-on-chip (SoC) technology. 3-D technology computer-aided design simulations show that a planar drift region and a planar drain region are advantageous for higher breakdown voltage (BV) to specific on-state resistance (Ron_sp) ratio (BV2/Ron_sp). By slightly extending the planar portion of the semiconductor active region into the gated channel region, the theoretical limit of BV2/Ron_sp for LDMOS can be surpassed. Hybrid FETs can be fabricated using a process flow that is compatible with the state-of-art FinFET SoC technology.
Published in: IEEE Transactions on Electron Devices ( Volume: 64, Issue: 10, October 2017)
Funding Agency:
Institute of Microelectronics, National Cheng Kung University, Tainan City, Taiwan
Yi-Ting Wu received the M.S. degree in electronics engineering from National Taiwan University, Taipei, Taiwan. He is currently pursuing the Ph.D. degree in microelectronics with National Cheng Kung University, Tainan, Taiwan.
He has been with United Microelectronics Corporation, where he was involved in the Tainan City, Taiwan, for the advanced technology development and device characterization of 28-nm CMOS and 14-nm Fin...Show More
Yi-Ting Wu received the M.S. degree in electronics engineering from National Taiwan University, Taipei, Taiwan. He is currently pursuing the Ph.D. degree in microelectronics with National Cheng Kung University, Tainan, Taiwan.
He has been with United Microelectronics Corporation, where he was involved in the Tainan City, Taiwan, for the advanced technology development and device characterization of 28-nm CMOS and 14-nm Fin...View more
Department of Electrical Engineering and Computer Sciences, University of California at Berkeley, Berkeley, CA, USA
Fei Ding received the B.S. degree in electrical engineering and computer sciences and the B.A. degree in applied mathematics from the University of California at Berkeley, Berkeley, CA, USA, in 2014, where he is currently pursuing the Ph.D. degree in electrical engineering with the Department of Electrical Engineering and Computer Sciences.
Fei Ding received the B.S. degree in electrical engineering and computer sciences and the B.A. degree in applied mathematics from the University of California at Berkeley, Berkeley, CA, USA, in 2014, where he is currently pursuing the Ph.D. degree in electrical engineering with the Department of Electrical Engineering and Computer Sciences.View more
Department of Electrical Engineering and Computer Sciences, University of California at Berkeley, Berkeley, CA, USA
Daniel Connelly received the Ph.D. degree from Stanford University, Stanford, CA, USA.
He was with Acorn Technologies, La Jolla, CA, USA, where he was involved in the advanced CMOS technology development. He was with Synopsys, Mountain View, CA, USA, where he was involved in device simulation and modeling. He is currently a Visiting Scholar with the University of California at Berkeley, Berkeley, CA, USA.
Daniel Connelly received the Ph.D. degree from Stanford University, Stanford, CA, USA.
He was with Acorn Technologies, La Jolla, CA, USA, where he was involved in the advanced CMOS technology development. He was with Synopsys, Mountain View, CA, USA, where he was involved in device simulation and modeling. He is currently a Visiting Scholar with the University of California at Berkeley, Berkeley, CA, USA.View more
Department of Electrical Engineering and Computer Sciences, University of California at Berkeley, Berkeley, CA, USA
Peng Zheng (S’11) received the B.S. degree in microelectronics from Tianjin University, Tianjin, China, in 2010, the M.S. degree in electrical and computer engineering from the Georgia Institute of Technology, Atlanta, GA, USA, in 2012, and the Ph.D. degree in electrical engineering and computer sciences from the University of California at Berkeley, Berkeley, CA, USA, in 2016.
Peng Zheng (S’11) received the B.S. degree in microelectronics from Tianjin University, Tianjin, China, in 2010, the M.S. degree in electrical and computer engineering from the Georgia Institute of Technology, Atlanta, GA, USA, in 2012, and the Ph.D. degree in electrical engineering and computer sciences from the University of California at Berkeley, Berkeley, CA, USA, in 2016.View more
Institute of Microelectronics, National Cheng Kung University, Tainan City, Taiwan
Meng-Hsueh Chiang (S’97–M’01–SM’07) received the B.S. degree in electrical engineering from National Cheng Kung University, Tainan, Taiwan, in 1992, and the M.S. and Ph.D. degrees in electrical and computer engineering from the University of Florida, Gainesville, FL, USA, in 1995 and 2001, respectively.
He is currently a Professor with the Department of Electrical Engineering, National Cheng Kung University.
Meng-Hsueh Chiang (S’97–M’01–SM’07) received the B.S. degree in electrical engineering from National Cheng Kung University, Tainan, Taiwan, in 1992, and the M.S. and Ph.D. degrees in electrical and computer engineering from the University of Florida, Gainesville, FL, USA, in 1995 and 2001, respectively.
He is currently a Professor with the Department of Electrical Engineering, National Cheng Kung University.View more
Institute of Microelectronics, National Cheng Kung University, Tainan City, Taiwan
Jone F. Chen (S’93–M’98) received the B.S. degree in electrical engineering from National Cheng Kung University, Tainan, Taiwan, in 1990, and the M.S. and Ph.D. degrees in electrical engineering from the University of California at Berkeley, Berkeley, CA, USA, in 1995 and 1998, respectively.
He has been with the Department of Electrical Engineering, Institute of Microelectronics, National Cheng Kung University, since 1999,...Show More
Jone F. Chen (S’93–M’98) received the B.S. degree in electrical engineering from National Cheng Kung University, Tainan, Taiwan, in 1990, and the M.S. and Ph.D. degrees in electrical engineering from the University of California at Berkeley, Berkeley, CA, USA, in 1995 and 1998, respectively.
He has been with the Department of Electrical Engineering, Institute of Microelectronics, National Cheng Kung University, since 1999,...View more
Department of Electrical Engineering and Computer Sciences, University of California at Berkeley, Berkeley, CA, USA
Tsu-Jae King Liu (SM’00–F’07) received the B.S., M.S., and Ph.D. degrees in electrical engineering from Stanford University, Stanford, CA, USA, in 1984, 1986, and 1994, respectively.
She has been with the Department of Electrical Engineering and Computer Sciences, University of California at Berkeley, Berkeley, CA, USA, since 1996, where she is currently the TSMC Distinguished Professor of microelectronics.
Tsu-Jae King Liu (SM’00–F’07) received the B.S., M.S., and Ph.D. degrees in electrical engineering from Stanford University, Stanford, CA, USA, in 1984, 1986, and 1994, respectively.
She has been with the Department of Electrical Engineering and Computer Sciences, University of California at Berkeley, Berkeley, CA, USA, since 1996, where she is currently the TSMC Distinguished Professor of microelectronics.View more
Contents Institute of Microelectronics, National Cheng Kung University, Tainan City, Taiwan
Yi-Ting Wu received the M.S. degree in electronics engineering from National Taiwan University, Taipei, Taiwan. He is currently pursuing the Ph.D. degree in microelectronics with National Cheng Kung University, Tainan, Taiwan.
He has been with United Microelectronics Corporation, where he was involved in the Tainan City, Taiwan, for the advanced technology development and device characterization of 28-nm CMOS and 14-nm FinFET since 2012.
Yi-Ting Wu received the M.S. degree in electronics engineering from National Taiwan University, Taipei, Taiwan. He is currently pursuing the Ph.D. degree in microelectronics with National Cheng Kung University, Tainan, Taiwan.
He has been with United Microelectronics Corporation, where he was involved in the Tainan City, Taiwan, for the advanced technology development and device characterization of 28-nm CMOS and 14-nm FinFET since 2012.View more
Department of Electrical Engineering and Computer Sciences, University of California at Berkeley, Berkeley, CA, USA
Fei Ding received the B.S. degree in electrical engineering and computer sciences and the B.A. degree in applied mathematics from the University of California at Berkeley, Berkeley, CA, USA, in 2014, where he is currently pursuing the Ph.D. degree in electrical engineering with the Department of Electrical Engineering and Computer Sciences.
Fei Ding received the B.S. degree in electrical engineering and computer sciences and the B.A. degree in applied mathematics from the University of California at Berkeley, Berkeley, CA, USA, in 2014, where he is currently pursuing the Ph.D. degree in electrical engineering with the Department of Electrical Engineering and Computer Sciences.View more
Department of Electrical Engineering and Computer Sciences, University of California at Berkeley, Berkeley, CA, USA
Daniel Connelly received the Ph.D. degree from Stanford University, Stanford, CA, USA.
He was with Acorn Technologies, La Jolla, CA, USA, where he was involved in the advanced CMOS technology development. He was with Synopsys, Mountain View, CA, USA, where he was involved in device simulation and modeling. He is currently a Visiting Scholar with the University of California at Berkeley, Berkeley, CA, USA.
Daniel Connelly received the Ph.D. degree from Stanford University, Stanford, CA, USA.
He was with Acorn Technologies, La Jolla, CA, USA, where he was involved in the advanced CMOS technology development. He was with Synopsys, Mountain View, CA, USA, where he was involved in device simulation and modeling. He is currently a Visiting Scholar with the University of California at Berkeley, Berkeley, CA, USA.View more
Department of Electrical Engineering and Computer Sciences, University of California at Berkeley, Berkeley, CA, USA
Peng Zheng (S’11) received the B.S. degree in microelectronics from Tianjin University, Tianjin, China, in 2010, the M.S. degree in electrical and computer engineering from the Georgia Institute of Technology, Atlanta, GA, USA, in 2012, and the Ph.D. degree in electrical engineering and computer sciences from the University of California at Berkeley, Berkeley, CA, USA, in 2016.
Peng Zheng (S’11) received the B.S. degree in microelectronics from Tianjin University, Tianjin, China, in 2010, the M.S. degree in electrical and computer engineering from the Georgia Institute of Technology, Atlanta, GA, USA, in 2012, and the Ph.D. degree in electrical engineering and computer sciences from the University of California at Berkeley, Berkeley, CA, USA, in 2016.View more
Institute of Microelectronics, National Cheng Kung University, Tainan City, Taiwan
Meng-Hsueh Chiang (S’97–M’01–SM’07) received the B.S. degree in electrical engineering from National Cheng Kung University, Tainan, Taiwan, in 1992, and the M.S. and Ph.D. degrees in electrical and computer engineering from the University of Florida, Gainesville, FL, USA, in 1995 and 2001, respectively.
He is currently a Professor with the Department of Electrical Engineering, National Cheng Kung University.
Meng-Hsueh Chiang (S’97–M’01–SM’07) received the B.S. degree in electrical engineering from National Cheng Kung University, Tainan, Taiwan, in 1992, and the M.S. and Ph.D. degrees in electrical and computer engineering from the University of Florida, Gainesville, FL, USA, in 1995 and 2001, respectively.
He is currently a Professor with the Department of Electrical Engineering, National Cheng Kung University.View more
Institute of Microelectronics, National Cheng Kung University, Tainan City, Taiwan
Jone F. Chen (S’93–M’98) received the B.S. degree in electrical engineering from National Cheng Kung University, Tainan, Taiwan, in 1990, and the M.S. and Ph.D. degrees in electrical engineering from the University of California at Berkeley, Berkeley, CA, USA, in 1995 and 1998, respectively.
He has been with the Department of Electrical Engineering, Institute of Microelectronics, National Cheng Kung University, since 1999, where he is currently a Professor.
Jone F. Chen (S’93–M’98) received the B.S. degree in electrical engineering from National Cheng Kung University, Tainan, Taiwan, in 1990, and the M.S. and Ph.D. degrees in electrical engineering from the University of California at Berkeley, Berkeley, CA, USA, in 1995 and 1998, respectively.
He has been with the Department of Electrical Engineering, Institute of Microelectronics, National Cheng Kung University, since 1999, where he is currently a Professor.View more
Department of Electrical Engineering and Computer Sciences, University of California at Berkeley, Berkeley, CA, USA
Tsu-Jae King Liu (SM’00–F’07) received the B.S., M.S., and Ph.D. degrees in electrical engineering from Stanford University, Stanford, CA, USA, in 1984, 1986, and 1994, respectively.
She has been with the Department of Electrical Engineering and Computer Sciences, University of California at Berkeley, Berkeley, CA, USA, since 1996, where she is currently the TSMC Distinguished Professor of microelectronics.
Tsu-Jae King Liu (SM’00–F’07) received the B.S., M.S., and Ph.D. degrees in electrical engineering from Stanford University, Stanford, CA, USA, in 1984, 1986, and 1994, respectively.
She has been with the Department of Electrical Engineering and Computer Sciences, University of California at Berkeley, Berkeley, CA, USA, since 1996, where she is currently the TSMC Distinguished Professor of microelectronics.View more
