Abstract:
The development at 1.9 THz of a microlens antenna consisting of a leaky-wave waveguide feeding and a silicon microlens is presented in this paper. The antenna has excelle...Show MoreMetadata
Abstract:
The development at 1.9 THz of a microlens antenna consisting of a leaky-wave waveguide feeding and a silicon microlens is presented in this paper. The antenna has excellent performances compared to horn antennas and can be fabricated entirely using silicon micromachining. Two antenna prototypes were developed: one with a 2.6-mm-diameter microlens and a directivity of 33.2 dB and the other with a 6.35-mm-diameter microlens and a directivity of 41.2 dB. Both prototypes were fabricated and measured, obtaining good agreements with simulations. The fabrication, assembly, and measurement process are explained and detailed in this paper.
Published in: IEEE Transactions on Terahertz Science and Technology ( Volume: 7, Issue: 2, March 2017)
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Keywords assist with retrieval of results and provide a means to discovering other relevant content. Learn more.
- IEEE Keywords
- Lenses ,
- Silicon ,
- Microoptics ,
- Feeds ,
- Surface treatment ,
- Fabrication
- Index Terms
- Microlenses ,
- Fabrication Process ,
- Antenna Prototype ,
- Etching ,
- Silicon Wafer ,
- Measurement Setup ,
- Stacked Layers ,
- Photoresist ,
- Radiation Pattern ,
- Cyanoacrylate ,
- Spherical Surface ,
- Lock-in Amplifier ,
- Feature Alignment ,
- Silicon-on-insulator ,
- Silicon Layer ,
- Terahertz Frequency ,
- Lens Surface ,
- Lens Thickness ,
- Air Cavity ,
- Matching Layer ,
- Bolometer ,
- Lens Antenna ,
- Circular Waveguide ,
- Far-field ,
- Measured Radiation Patterns
- Author Keywords
Contents Keywords assist with retrieval of results and provide a means to discovering other relevant content. Learn more.
- IEEE Keywords
- Lenses ,
- Silicon ,
- Microoptics ,
- Feeds ,
- Surface treatment ,
- Fabrication
- Index Terms
- Microlenses ,
- Fabrication Process ,
- Antenna Prototype ,
- Etching ,
- Silicon Wafer ,
- Measurement Setup ,
- Stacked Layers ,
- Photoresist ,
- Radiation Pattern ,
- Cyanoacrylate ,
- Spherical Surface ,
- Lock-in Amplifier ,
- Feature Alignment ,
- Silicon-on-insulator ,
- Silicon Layer ,
- Terahertz Frequency ,
- Lens Surface ,
- Lens Thickness ,
- Air Cavity ,
- Matching Layer ,
- Bolometer ,
- Lens Antenna ,
- Circular Waveguide ,
- Far-field ,
- Measured Radiation Patterns
- Author Keywords
