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Optomechanical oscillators fabricated in a CMOS-compatible foundry | IEEE Conference Publication | IEEE Xplore

Optomechanical oscillators fabricated in a CMOS-compatible foundry


Abstract:

We demonstrate self-sustained mechanical oscillations at room temperature and ambient pressure in a silicon photonic crystal slot-cavity fabricated by a CMOS-Foundry. Opt...Show More

Abstract:

We demonstrate self-sustained mechanical oscillations at room temperature and ambient pressure in a silicon photonic crystal slot-cavity fabricated by a CMOS-Foundry. Optical quality factor as high as Qopt = 4 × 105 and an optomechanical coupling rate of g0/2π = 76 kHz are observed.
Date of Conference: 05-10 June 2016
Date Added to IEEE Xplore: 19 December 2016
ISBN Information:
Conference Location: San Jose, CA, USA

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