Co-integration of a quartz OCXO and Si MEMS inertial sensors for improved navigational accuracy

On-chip integration of quartz resonators with Si devices opens new opportunities for microsystem miniaturization and enhanced performance. In addition to integrating with electronics, the integration of piezoelectric quartz resonators with other sensors of different material composition is also possible. In this paper, we demonstrate that a VHF SC-cut quartz resonator can be integrated within a high-aspect-ratio Si disk gyro with on-chip heating for locally ovenizing both devices in the same wafer-level vacuum cavity. The SC-cut OCXO can be used to lock the frequency and temperature of the gyro to ≤ 2 ppb and ≤50 μΧ, respectively, for improved accuracy.