Abstract:
Nano-computer numerical control (CNC) machining technology is employed for the fabrication of sub-THz (100-1000 GHz) vacuum electron devices. Submicron feature tolerances...Show MoreMetadata
Abstract:
Nano-computer numerical control (CNC) machining technology is employed for the fabrication of sub-THz (100-1000 GHz) vacuum electron devices. Submicron feature tolerances and placement accuracy have been achieved and surface roughness of a few tens of nanometers has been demonstrated providing high-quality radio frequency (RF) transmission and reflection parameters on the tested circuit structures. Details of the manufacturing approach are reported for the following devices: W-band sheet beam (SB) klystron, two designs of a 220-GHz SB double-staggered grating traveling wave tube (TWT), 263-GHz SB TWT amplifier for an electron paramagnetic resonance spectrometer, 346-GHz SB backward wave oscillator for fusion plasma diagnostics, 346-GHz pencil beam backward wave oscillator, and 270-GHz pencil beam folded waveguide TWT self-driving amplifier. Application of the nano-CNC machining to nanocomposite scandate tungsten cathodes as well as to passive RF components is also discussed.
Published in: IEEE Transactions on Electron Devices ( Volume: 63, Issue: 10, October 2016)
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- IEEE Keywords
- Index Terms
- Vacuum Electron ,
- Vacuum Electronic Devices ,
- Electron Paramagnetic Resonance ,
- Passive Components ,
- Narrow Beam ,
- Computer Numerical Control ,
- Aspect Ratio ,
- Operation Mode ,
- Continuous Wave ,
- Pinhole ,
- Surface Finish ,
- Additive Manufacturing ,
- Terahertz ,
- Manufacturing Techniques ,
- Skin Depth ,
- Diffraction Grating ,
- Hexagonal Boron Nitride ,
- Electrical Discharge Machining ,
- Cold Test ,
- GHz Bandwidth ,
- Polycrystalline Diamond ,
- Electron Gun ,
- dB Gain
- Author Keywords
Contents Keywords assist with retrieval of results and provide a means to discovering other relevant content. Learn more.
- IEEE Keywords
- Index Terms
- Vacuum Electron ,
- Vacuum Electronic Devices ,
- Electron Paramagnetic Resonance ,
- Passive Components ,
- Narrow Beam ,
- Computer Numerical Control ,
- Aspect Ratio ,
- Operation Mode ,
- Continuous Wave ,
- Pinhole ,
- Surface Finish ,
- Additive Manufacturing ,
- Terahertz ,
- Manufacturing Techniques ,
- Skin Depth ,
- Diffraction Grating ,
- Hexagonal Boron Nitride ,
- Electrical Discharge Machining ,
- Cold Test ,
- GHz Bandwidth ,
- Polycrystalline Diamond ,
- Electron Gun ,
- dB Gain
- Author Keywords
