Abstract:
In this paper, atomic force microscopy and its variation scanning microwave microscopy were used for the characterization of microelectronics (PNP bipolar transistors on ...Show MoreMetadata
Abstract:
In this paper, atomic force microscopy and its variation scanning microwave microscopy were used for the characterization of microelectronics (PNP bipolar transistors on a chip and epitaxial layers with different properties on a silicon substrate). The capabilities of these methods in the quality control process are presented.
Published in: 2016 21st International Conference on Microwave, Radar and Wireless Communications (MIKON)
Date of Conference: 09-11 May 2016
Date Added to IEEE Xplore: 16 June 2016
Electronic ISBN:978-1-5090-2214-4
Contents 