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Re-configurable fluid circuits by PDMS elastomer micromachining | IEEE Conference Publication | IEEE Xplore
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Re-configurable fluid circuits by PDMS elastomer micromachining

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D. Armani; C. Liu; N. Aluru
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Abstract:

We report on a microfabrication technique for realizing re-configurable micro fluidics devices using polymethylsiloxane material (PDMS). The mechanical characteristics of...Show More

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Abstract:

We report on a microfabrication technique for realizing re-configurable micro fluidics devices using polymethylsiloxane material (PDMS). The mechanical characteristics of the material, including the Young's modulus and the adhesion energy have been determined experimentally. The magnitude of Young's modulus ranges from 8.7/spl times/10/sup 5/ Pa to 3.6/spl times/10/sup 5/ Pa. The adhesion energy is a function of the PDMS composition as well as chemical treatment. A method for efficiently developing flow interconnects has been demonstrated.
Published in: Technical Digest. IEEE International MEMS 99 Conference. Twelfth IEEE International Conference on Micro Electro Mechanical Systems (Cat. No.99CH36291)
Date of Conference: 21-21 January 1999
Date Added to IEEE Xplore: 06 August 2002
Print ISBN:0-7803-5194-0
Print ISSN: 1084-6999
DOI: 10.1109/MEMSYS.1999.746817
Conference Location: Orlando, FL, USA
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