Fabrication Of A Silicon Micromachined Capacitive Microphone Using A Dry-etch Process | IEEE Conference Publication | IEEE Xplore

Fabrication Of A Silicon Micromachined Capacitive Microphone Using A Dry-etch Process

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Published in: Proceedings of the International Solid-State Sensors and Actuators Conference - TRANSDUCERS '95

Date of Conference: 25-29 June 1995

Date Added to IEEE Xplore: 06 August 2002

Print ISBN:91-630-3473-5

DOI: 10.1109/SENSOR.1995.721929

Conference Location: Stockholm, Sweden

First Page of the Article

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