Abstract:
A MEMS (Micro-Electro-Mechanical Systems) bulk disk resonator is applied for mass sensing under its dynamic mode. The classical readout circuitry involves sophisticated f...Show MoreMetadata
Abstract:
A MEMS (Micro-Electro-Mechanical Systems) bulk disk resonator is applied for mass sensing under its dynamic mode. The classical readout circuitry involves sophisticated feedback loop and feedthrough compensation. We propose a simple straightforward non-loop pulse mode actuation and capacitive readout scheme. In order to verify its feasibility in liquid bio-chemical sensing environment, an experimental measurement is conducted with humidity sensing application. The measured resonant frequency changes 60kHz of 67.7MHz with a humidity change of 0~80%.
Published in: The 9th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)
Date of Conference: 13-16 April 2014
Date Added to IEEE Xplore: 25 September 2014
Electronic ISBN:978-1-4799-4726-3
Department of Electronics and Information, Soochow University, China
Department of Nanotechnology, Technical University of Denmark, Denmark
Danish Technological Institutes, Denmark
Department of Microelectronics, University of Science and Technology of China, China
Contents Department of Electronics and Information, Soochow University, China
Department of Nanotechnology, Technical University of Denmark, Denmark
Danish Technological Institutes, Denmark
Department of Microelectronics, University of Science and Technology of China, China
