Structural and optical properties of AgO thin films grown by RF reactive magnetron sputtering technique

Ag and AgO thin films were grown on glass substrates at room temperature by RF reactive magnetron sputtering technique using silver metal target at high oxygen flow rates 10 to 30 sccm. The crystal structure, surface morphology, composition and optical properties of the films were investigated by X-ray diffraction (XRD), scanning electron microscopy (SEM), energy dispersive spectroscopy (EDS) and UV-VIS spectrometer, respectively. X-ray diffraction data on these films showed a systematic change from metallic silver to silver oxide (AgO). Optical measurements indicate the existence of a direct-band gap-allowed optical transition with a corresponding energy gap in the range of 1.69 – 1.71 eV.