Abstract:
Since mid 60s, Surface Acoustic Wave (SAW) devices have been using extensively in electronics for telecommunication. However, their potential use in the sensors field is ...Show MoreMetadata
Abstract:
Since mid 60s, Surface Acoustic Wave (SAW) devices have been using extensively in electronics for telecommunication. However, their potential use in the sensors field is only a matter of recent interest. This paper presents an overview of the sensing mechanisms that allow detection of temperature, strain (for pressure & torque), mass, conductivity (e.g. gas detection) and viscosity by means of SAW based devices. Design and technological challenges are presented, as well as solutions to overcome them in order to obtain reliable devices. The possibility of using such devices as passive wireless sensors is also discussed.
Published in: 2009 International Semiconductor Conference
Date of Conference: 12-14 October 2009
Date Added to IEEE Xplore: 17 November 2009
Print ISBN:978-1-4244-4413-7