Abstract:
We discuss the contribution of phonon interactions in determining the upper limit of f.Q product in micromechanical resonators. There is a perception in the MEMS communit...Show MoreMetadata
Abstract:
We discuss the contribution of phonon interactions in determining the upper limit of f.Q product in micromechanical resonators. There is a perception in the MEMS community that the maximum f.Q product of a microresonator is limited to a ldquofrequency-independent constantrdquo determined by the material properties of the resonator. In this paper, we discuss that for frequencies higher than omegatau = 1/tau, where tau is the phonon relaxation time, the f.Q product is no longer constant but a linear function of frequency. This makes it possible to reach very high Qs in GHz micromechanical resonators. Moreover, we show that lang100rang is the preferred crystalline orientation for obtaining very high Q in bulk-acoustic-mode silicon resonators above ~750 MHz, while lang100rang is the preferred direction for achieving high-Q at lower frequencies.
Published in: TRANSDUCERS 2009 - 2009 International Solid-State Sensors, Actuators and Microsystems Conference
Date of Conference: 21-25 June 2009
Date Added to IEEE Xplore: 13 October 2009
ISBN Information: