Current MEMS technology and MEMS sensors -focusing on inertial sensors-

In this paper, current micro electro mechanical systems (MEMS) technology and some inertial sensors will be discussed. MEMS technology is presently becoming a key technology for future microelectronics. Some remarkable developments in MEMS are the driving force behind the current MEMS field, and many MEMS devices in the market are using these technologies effectively. Some particularly remarkable MEMS technologies and devices are described in this paper.