Directional Growth and Oxide Electrodes in CSD-based PZT Films | IEEE Conference Publication | IEEE Xplore
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Directional Growth and Oxide Electrodes in CSD-based PZT Films

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G. S. Grader; I. Shturman; M. Kabla; A. Etin; G. E. Shter
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Abstract:

PbZr0.52Ti0.48O3 (PZT) was deposited on three substrates: Pt/Ti/SiO2/Si, PbTiO3/Pt/Ti/SiO2/Si and LaNiO3/SiO2/Si. The final PZT film morphology, orientation, piezoelectri...Show More

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Abstract:

PbZr0.52Ti0.48O3 (PZT) was deposited on three substrates: Pt/Ti/SiO2/Si, PbTiO3/Pt/Ti/SiO2/Si and LaNiO3/SiO2/Si. The final PZT film morphology, orientation, piezoelectric and ferroelectric properties were investigated and related to the substrate type.
Published in: 2007 Sixteenth IEEE International Symposium on the Applications of Ferroelectrics
Date of Conference: 27-31 May 2007
Date Added to IEEE Xplore: 04 December 2007
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ISSN Information:

DOI: 10.1109/ISAF.2007.4393205
Conference Location: Nara, Japan
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