Direct Liquid Manipulation by Parallel Micro Syringe System for High Controllability with Pico-Liter Scale

On-chip picolitter scale micro syringe system by using electrostatically controlled linear actuator (ECLIA) was proposed and demonstrated previously. Parallel sliders of ECLIA can push and pull liquid in channels independently. The system achieved picoliter-scale liquid manipulation, however, the indirect drive through separating membrane caused a poor response. This paper reports an improved system from the aspect of controllability. The improved system directly manipulates liquid by sliders of ECLIA. The head of a slider is 340 μm x 200 μm at the end. 4 sliders are arranged to demonstrate parallel manipulation. A developed system shows 1.37pl/step in fluidic delivery. Furthermore, integrated structure with sliders and channels will be also designed to demonstrate advantages of batch- fabrication.