Development of a Linear Micro Inductosyn Sensor

Incremental inductive systems with interpolation capabilities allow lend themselves for miniaturization. The goal is the development of an inductive micro position measuring system principally based on the "inductosyn" principle and its fabrication in thin film fabrication technology. Inductive measuring systems in thin film technology feature a large degree of integration, miniaturization, and low manufacturing costs.

Introduction

Incremental inductive systems with interpolation capabilities allow lend themselves for miniaturization [1]. The goal is the development of an inductive micro position measuring system principally based on the “inductosyn” principle and its fabrication in thin film fabrication technology. Inductive measuring systems in thin film technology feature a large degree of integration, miniaturization, and low manufacturing costs.