Applying SEMI E10 guidelines to manufacturing

The semiconductor industry has been instrumental in developing a methodology for evaluating the application of information from equipment regarding its operating condition. The development of the SEMI E10 Guidelines provides a means for evaluating the operation of equipment. While the Guidelines were developed for the semiconductor industry, the E10 States can be applied to any phase of modeling. This paper reviews the definition of the various states and how the states can be used to better understand the equipment functions. This paper also presents a cohesive method of developing models that can be used to address various levels of details in the analysis effort.<>