Lead titanate thin films for piezoelectric applications

C-axis-oriented pure PbTiO/sub 3/ thin films were investigated for piezoelectric applications. Piezoelectric and ferroelectric properties of RF-sputtered PbTiO/sub 3/ films epitaxially grown on a SrTiO/sub 2/ single-crystal substrate are reviewed. The c-axis-oriented PbTiO/sub 3/ films were shown to be applicable to high-frequency ultrasonic devices in a composite vibrator form combined with a nonpiezoelectric substrate such as Si. A promising method for fabricating c-axis-oriented PbTiO/sub 3/ films on an electroded Si