Abstract:
We report an electrostatic micro shutter array for astronomical telescopes for parallel processing infrared spectroscopy of multiple celestial objects using bulk-micromac...Show MoreMetadata
Abstract:
We report an electrostatic micro shutter array for astronomical telescopes for parallel processing infrared spectroscopy of multiple celestial objects using bulk-micromachining of silicon-on-insulator wafers. Successful operation of micro torsion shutter to a 90-degree-deflection has been demonstrated with applied voltages of up to 95 V DC
Published in: IEEE/LEOS International Conference on Optical MEMS and Their Applications Conference, 2005.
Date of Conference: 01-04 August 2005
Date Added to IEEE Xplore: 21 November 2005
Print ISBN:0-7803-9278-7
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