Abstract:
There are numerous methods for measuring the temperature of an operating semiconductor device. The methods can be broadly placed into three generic categories: electrical...Show MoreMetadata
Abstract:
There are numerous methods for measuring the temperature of an operating semiconductor device. The methods can be broadly placed into three generic categories: electrical, optical, and physically contacting. The fundamentals underlying each of the categories are discussed, and a review of the variety of techniques within each category is given. Some of the advantages and disadvantages as well as the spatial, time, and temperature resolution are also provided.
Published in: Twentieth Annual IEEE Semiconductor Thermal Measurement and Management Symposium (IEEE Cat. No.04CH37545)
Date of Conference: 11-11 March 2004
Date Added to IEEE Xplore: 04 October 2004
Print ISBN:0-7803-8363-X
Print ISSN: 1065-2221
Contents 