Abstract:
A new approach is presented for fabricating monolithic crystalline silicon tilting-mirror microoptoelectromechanical systems (MOEMS) devices. The activation electrodes, e...Show MoreMetadata
Abstract:
A new approach is presented for fabricating monolithic crystalline silicon tilting-mirror microoptoelectromechanical systems (MOEMS) devices. The activation electrodes, etched from a thick silicon layer deposited over insulating oxide onto the top surface of a silicon-on-insulator (SOI) wafer, are displaced from the mirrors and interact with these tilting elements via electrostatic fringing fields. In contrast to the more usual parallel-plate activation, the rotation angle saturates at high voltages. This paper discusses concept, design, and processing, and also compares modeling and measured performance of a specific 9° tilt range device array.
Published in: Journal of Microelectromechanical Systems ( Volume: 12, Issue: 5, October 2003)
Lucent Technologies, Bell Laboratories, Murray Hill, NJ, USA
Dennis S. Greywall received the B.S. degree in physics from the University of Detroit, MI, in 1965 and the Ph.D. degree in low-temperature physics from Indiana University in 1970. Immediately thereafter, he joined Bell Laboratories, Murray Hill, NJ.
His work has included experimental studies of helium crystals, superfluidity in 3He and 4He, and magnetism in two-dimensional 3He. He has also worked on noise evasion and on me...Show More
Dennis S. Greywall received the B.S. degree in physics from the University of Detroit, MI, in 1965 and the Ph.D. degree in low-temperature physics from Indiana University in 1970. Immediately thereafter, he joined Bell Laboratories, Murray Hill, NJ.
His work has included experimental studies of helium crystals, superfluidity in 3He and 4He, and magnetism in two-dimensional 3He. He has also worked on noise evasion and on me...View more
Lucent Technologies, Bell Laboratories, Murray Hill, NJ, USA
Chien-Shing Pai received the B.S. degree in electrophysics from Chiao-Tung University, Hsin-Chu, Taiwan, in 1978 and the Ph.D. degree in electrical engineering from the University of California, San Diego in 1985.
Since 1985, he has been working at Bell Laboratories, Murray Hill, NJ, in the area of Advanced Electronic Device Research. He was involved in research and development in both device and processing for advanced CM...Show More
Chien-Shing Pai received the B.S. degree in electrophysics from Chiao-Tung University, Hsin-Chu, Taiwan, in 1978 and the Ph.D. degree in electrical engineering from the University of California, San Diego in 1985.
Since 1985, he has been working at Bell Laboratories, Murray Hill, NJ, in the area of Advanced Electronic Device Research. He was involved in research and development in both device and processing for advanced CM...View more
MEMS R&D Group, Agere Systems, Berkeley Heights, NJ, USA
Sang-Hyun Oh received the B.S. degree in physics from the Korean Advanced Institute of Science and Technology (KAIST), Korea, in 1996 and the Ph.D. degree in applied physics from Stanford University, Stanford, CA, in 2001. His doctoral work was on the design and fabrication of nanoscale CMOS transistors.
He joined the MEMS R&D group at Agere Systems in 2001, where he was engaged in the design of optical MEMS devices such a...Show More
Sang-Hyun Oh received the B.S. degree in physics from the Korean Advanced Institute of Science and Technology (KAIST), Korea, in 1996 and the Ph.D. degree in applied physics from Stanford University, Stanford, CA, in 2001. His doctoral work was on the design and fabrication of nanoscale CMOS transistors.
He joined the MEMS R&D group at Agere Systems in 2001, where he was engaged in the design of optical MEMS devices such a...View more
MEMS R&D Group, Agere Systems, Berkeley Heights, NJ, USA
Chorng-Ping Chang (M'97-SM'01) received the B.S. degree in nuclear engineering from the National Tsing Hua University, Hsu-Chu, Taiwan, in 1978 and the Ph.D. degree in nuclear fusion and plasma physics from the University of California at Berkeley in 1985.
In the same year, he joined AT&T Bell Laboratories (which later became Lucent Technologies Bell Laboratories), Murray Hill, NJ, engaging in research and development acti...Show More
Chorng-Ping Chang (M'97-SM'01) received the B.S. degree in nuclear engineering from the National Tsing Hua University, Hsu-Chu, Taiwan, in 1978 and the Ph.D. degree in nuclear fusion and plasma physics from the University of California at Berkeley in 1985.
In the same year, he joined AT&T Bell Laboratories (which later became Lucent Technologies Bell Laboratories), Murray Hill, NJ, engaging in research and development acti...View more
Lucent Technologies, Bell Laboratories, Holmdel, NJ, USA
Dan M. Marom received the B.Sc. degree in mechanical engineering and the M.Sc. degree in electrical engineering, both from Tel-Aviv University, Israel, in 1989 and 1995, respectively, and the Ph.D. degree from University of California, San Diego (UCSD) in 2000. In his doctoral dissertation, he investigated femtosecond-rate optical signal processing with applications in ultrafast communications.
From 1996 through 2000, he w...Show More
Dan M. Marom received the B.Sc. degree in mechanical engineering and the M.Sc. degree in electrical engineering, both from Tel-Aviv University, Israel, in 1989 and 1995, respectively, and the Ph.D. degree from University of California, San Diego (UCSD) in 2000. In his doctoral dissertation, he investigated femtosecond-rate optical signal processing with applications in ultrafast communications.
From 1996 through 2000, he w...View more
Lucent Technologies, Bell Laboratories, Murray Hill, NJ, USA
Paul A. Busch received the B.S. degree in physics from Upsala College in 1972.
He then joined the Physical Research Laboratory at Bell Laboratories, Murray Hill, NJ. His work has included studies in condensed matter physics at ultralow temperatures and the mechanical testing of prototype MEMS devices.
Paul A. Busch received the B.S. degree in physics from Upsala College in 1972.
He then joined the Physical Research Laboratory at Bell Laboratories, Murray Hill, NJ. His work has included studies in condensed matter physics at ultralow temperatures and the mechanical testing of prototype MEMS devices.View more
Lucent Technologies, Bell Laboratories, Murray Hill, NJ, USA
Raymond A. Cirelli is currently a Senior Member of Technical Staff at Lucent Technologies, Bell Laboratories, Murray Hill, NJ. He has authored over 70 technical papers and has been awarded numerous patents in the field of optical lithography. He has made critical contributions to various aspects of deep-ultraviolet lithography in the areas of; off-axis illumination, reflectivity control, and proximity effect correction. T...Show More
Raymond A. Cirelli is currently a Senior Member of Technical Staff at Lucent Technologies, Bell Laboratories, Murray Hill, NJ. He has authored over 70 technical papers and has been awarded numerous patents in the field of optical lithography. He has made critical contributions to various aspects of deep-ultraviolet lithography in the areas of; off-axis illumination, reflectivity control, and proximity effect correction. T...View more
Lucent Technologies, Bell Laboratories, Murray Hill, NJ, USA
J. Ashley Taylor received the Ph.D. degree physical chemistry at the University of Houston, TX, studying photoionization of gaseous molecules.
As a Postdoctoral Fellow, also at the University of Houston, he investigated the reactions of ions with surfaces. He then joined Perkin-Elmer, Physical Electronics Division conducting surface analysis (XPS and Auger) for many different applications. In 1984, he joined AT&T Bell Labo...Show More
J. Ashley Taylor received the Ph.D. degree physical chemistry at the University of Houston, TX, studying photoionization of gaseous molecules.
As a Postdoctoral Fellow, also at the University of Houston, he investigated the reactions of ions with surfaces. He then joined Perkin-Elmer, Physical Electronics Division conducting surface analysis (XPS and Auger) for many different applications. In 1984, he joined AT&T Bell Labo...View more
Lucent Technologies, Bell Laboratories, Murray Hill, NJ, USA
Fred P. Klemens, photograph and biography not available at the time of publication.
Fred P. Klemens, photograph and biography not available at the time of publication.View more
Lucent Technologies, Bell Laboratories, Murray Hill, NJ, USA
Thomas W. Sorsch, photograph and biography not available at the time of publication.
Thomas W. Sorsch, photograph and biography not available at the time of publication.View more
Lucent Technologies, Bell Laboratories, Murray Hill, NJ, USA
John Eric Bower received the Ph.D. degree in physics from the Stevens Institute of Technology, Hoboken, NJ, in 1993.
Following the completion of his undergraduate physics degree at Pennsylvania State University, he was employed by Chemcut Corporation, Nuclide Corporation, Instruments SA, and Arthur D. Little, Inc., where he worked in a number of fields, including mass spectrometry, atomic emission spectroscopy, and Molecul...Show More
John Eric Bower received the Ph.D. degree in physics from the Stevens Institute of Technology, Hoboken, NJ, in 1993.
Following the completion of his undergraduate physics degree at Pennsylvania State University, he was employed by Chemcut Corporation, Nuclide Corporation, Instruments SA, and Arthur D. Little, Inc., where he worked in a number of fields, including mass spectrometry, atomic emission spectroscopy, and Molecul...View more
Lucent Technologies, Bell Laboratories, Murray Hill, NJ, USA
Warren Y.-C. Lai (M'82) received the Ph.D. degree in physics from the California Institute of Technology, Pasadena, in 1980, working in low-temperature physics. He then joined Bell Laboratories, Murray Hill, NJ, doing research and development in silicon microelectronics technology, optical MEMS technology and nanotechnology. His work in silicon multilevel interconnect technology for CMOS covered Al multilevel interconnect...Show More
Warren Y.-C. Lai (M'82) received the Ph.D. degree in physics from the California Institute of Technology, Pasadena, in 1980, working in low-temperature physics. He then joined Bell Laboratories, Murray Hill, NJ, doing research and development in silicon microelectronics technology, optical MEMS technology and nanotechnology. His work in silicon multilevel interconnect technology for CMOS covered Al multilevel interconnect...View more
MEMS R&D Group, Agere Systems, Berkeley Heights, NJ, USA
Hyongsok T. Soh (M'02) received the B.S. degree with distinction with a double major in mechanical engineering and materials science from Cornell University, Ithaca, NY, in 1992, and the M.S. and Ph.D. degrees in electrical engineering from Stanford University, Stanford, CA, in 1995 and 1999, respectively.
He served as the Technical Manager of MEMS device research group at Bell Laboratories and MEMS R&D group at Agere Syst...Show More
Hyongsok T. Soh (M'02) received the B.S. degree with distinction with a double major in mechanical engineering and materials science from Cornell University, Ithaca, NY, in 1992, and the M.S. and Ph.D. degrees in electrical engineering from Stanford University, Stanford, CA, in 1995 and 1999, respectively.
He served as the Technical Manager of MEMS device research group at Bell Laboratories and MEMS R&D group at Agere Syst...View more
Contents Lucent Technologies, Bell Laboratories, Murray Hill, NJ, USA
Dennis S. Greywall received the B.S. degree in physics from the University of Detroit, MI, in 1965 and the Ph.D. degree in low-temperature physics from Indiana University in 1970. Immediately thereafter, he joined Bell Laboratories, Murray Hill, NJ.
His work has included experimental studies of helium crystals, superfluidity in 3He and 4He, and magnetism in two-dimensional 3He. He has also worked on noise evasion and on mechanical dissipation in very small systems at very low temperatures. Since 1995, his focus has been on the mechanical design and modeling of MOEMS devices such as modulators, cross connects, and wavelength sorting switches. In addition, he has designed MEMS-based RF filters, in vivo medical devices, and adaptive optics mirrors.
Dr. Greywall is a Distinguished Member of Technical Staff at Bell Laboratories, a Fellow of the American Physical Society, and was the recipient of the 1993 London Prize in Low Temperature Physics.
Dennis S. Greywall received the B.S. degree in physics from the University of Detroit, MI, in 1965 and the Ph.D. degree in low-temperature physics from Indiana University in 1970. Immediately thereafter, he joined Bell Laboratories, Murray Hill, NJ.
His work has included experimental studies of helium crystals, superfluidity in 3He and 4He, and magnetism in two-dimensional 3He. He has also worked on noise evasion and on mechanical dissipation in very small systems at very low temperatures. Since 1995, his focus has been on the mechanical design and modeling of MOEMS devices such as modulators, cross connects, and wavelength sorting switches. In addition, he has designed MEMS-based RF filters, in vivo medical devices, and adaptive optics mirrors.
Dr. Greywall is a Distinguished Member of Technical Staff at Bell Laboratories, a Fellow of the American Physical Society, and was the recipient of the 1993 London Prize in Low Temperature Physics.View more
Lucent Technologies, Bell Laboratories, Murray Hill, NJ, USA
Chien-Shing Pai received the B.S. degree in electrophysics from Chiao-Tung University, Hsin-Chu, Taiwan, in 1978 and the Ph.D. degree in electrical engineering from the University of California, San Diego in 1985.
Since 1985, he has been working at Bell Laboratories, Murray Hill, NJ, in the area of Advanced Electronic Device Research. He was involved in research and development in both device and processing for advanced CMOS technologies for ULSI applications. His work included selective-epi and silicide for front-end CMOS device and low-k materials and multilevel-interconnect integration for sub-100 nm ULSI applications. In 2000, his work expanded to include MEMS technology for communication and biotech applications. He is a Distinguished Member of Technical Staff at Bell Laboratories. He has served as committee member in VLSI Technology Symposium since 1996 and has organized and chaired short course and rump session for several years.
Chien-Shing Pai received the B.S. degree in electrophysics from Chiao-Tung University, Hsin-Chu, Taiwan, in 1978 and the Ph.D. degree in electrical engineering from the University of California, San Diego in 1985.
Since 1985, he has been working at Bell Laboratories, Murray Hill, NJ, in the area of Advanced Electronic Device Research. He was involved in research and development in both device and processing for advanced CMOS technologies for ULSI applications. His work included selective-epi and silicide for front-end CMOS device and low-k materials and multilevel-interconnect integration for sub-100 nm ULSI applications. In 2000, his work expanded to include MEMS technology for communication and biotech applications. He is a Distinguished Member of Technical Staff at Bell Laboratories. He has served as committee member in VLSI Technology Symposium since 1996 and has organized and chaired short course and rump session for several years.View more
MEMS R&D Group, Agere Systems, Berkeley Heights, NJ, USA
Sang-Hyun Oh received the B.S. degree in physics from the Korean Advanced Institute of Science and Technology (KAIST), Korea, in 1996 and the Ph.D. degree in applied physics from Stanford University, Stanford, CA, in 2001. His doctoral work was on the design and fabrication of nanoscale CMOS transistors.
He joined the MEMS R&D group at Agere Systems in 2001, where he was engaged in the design of optical MEMS devices such as cross-connects, dynamic gain equalizers, and wavelength sorting switches. From 1998 to 2000, he worked at Bell Laboratories, Murray Hill, NJ, where he focused on developing novel sub-50 nm vertical transistors. He is now an Advisory Engineer at IBM Microelectronics in East Fishkill, NY, where he is developing high-performance 90-nm logic technology.
Sang-Hyun Oh received the B.S. degree in physics from the Korean Advanced Institute of Science and Technology (KAIST), Korea, in 1996 and the Ph.D. degree in applied physics from Stanford University, Stanford, CA, in 2001. His doctoral work was on the design and fabrication of nanoscale CMOS transistors.
He joined the MEMS R&D group at Agere Systems in 2001, where he was engaged in the design of optical MEMS devices such as cross-connects, dynamic gain equalizers, and wavelength sorting switches. From 1998 to 2000, he worked at Bell Laboratories, Murray Hill, NJ, where he focused on developing novel sub-50 nm vertical transistors. He is now an Advisory Engineer at IBM Microelectronics in East Fishkill, NY, where he is developing high-performance 90-nm logic technology.View more
MEMS R&D Group, Agere Systems, Berkeley Heights, NJ, USA
Chorng-Ping Chang (M'97-SM'01) received the B.S. degree in nuclear engineering from the National Tsing Hua University, Hsu-Chu, Taiwan, in 1978 and the Ph.D. degree in nuclear fusion and plasma physics from the University of California at Berkeley in 1985.
In the same year, he joined AT&T Bell Laboratories (which later became Lucent Technologies Bell Laboratories), Murray Hill, NJ, engaging in research and development activity on advanced plasma processing, front-end CMOS process integration, novel sub-50 nm device fabrication and silicon MEMS for telecommunication applications. Currently, he works for New Jersey Nanotechnology Consortium, the spin-off of Bell Laboratories nanofabrication facility.
Dr. Chang is a Senior Member of IEEE Electron Devices Society. He had served on the Device and Interconnect Technology subcommittee and the Process Technology subcommittee for IEEE IEDM (International Electron Devices Meeting). He has been an Editor of IEEE Electron Device Letters since 2000, specialized in silicon device and technology.
Chorng-Ping Chang (M'97-SM'01) received the B.S. degree in nuclear engineering from the National Tsing Hua University, Hsu-Chu, Taiwan, in 1978 and the Ph.D. degree in nuclear fusion and plasma physics from the University of California at Berkeley in 1985.
In the same year, he joined AT&T Bell Laboratories (which later became Lucent Technologies Bell Laboratories), Murray Hill, NJ, engaging in research and development activity on advanced plasma processing, front-end CMOS process integration, novel sub-50 nm device fabrication and silicon MEMS for telecommunication applications. Currently, he works for New Jersey Nanotechnology Consortium, the spin-off of Bell Laboratories nanofabrication facility.
Dr. Chang is a Senior Member of IEEE Electron Devices Society. He had served on the Device and Interconnect Technology subcommittee and the Process Technology subcommittee for IEEE IEDM (International Electron Devices Meeting). He has been an Editor of IEEE Electron Device Letters since 2000, specialized in silicon device and technology.View more
Lucent Technologies, Bell Laboratories, Holmdel, NJ, USA
Dan M. Marom received the B.Sc. degree in mechanical engineering and the M.Sc. degree in electrical engineering, both from Tel-Aviv University, Israel, in 1989 and 1995, respectively, and the Ph.D. degree from University of California, San Diego (UCSD) in 2000. In his doctoral dissertation, he investigated femtosecond-rate optical signal processing with applications in ultrafast communications.
From 1996 through 2000, he was a Fannie and John Hertz Foundation Graduate Fellow at UCSD. In 2000, he joined the Advanced Photonics Research Department at Bell Laboratories, Lucent Technologies, where he is working on novel MEMS based switching solutions using MEMS technology for optical communications.
Dr. Marom received the IEEE Lasers and Electro-Optics Society best student paper award in 1999 for his work describing instantaneous time reversal of complex amplitude ultrafast waveforms.
Dan M. Marom received the B.Sc. degree in mechanical engineering and the M.Sc. degree in electrical engineering, both from Tel-Aviv University, Israel, in 1989 and 1995, respectively, and the Ph.D. degree from University of California, San Diego (UCSD) in 2000. In his doctoral dissertation, he investigated femtosecond-rate optical signal processing with applications in ultrafast communications.
From 1996 through 2000, he was a Fannie and John Hertz Foundation Graduate Fellow at UCSD. In 2000, he joined the Advanced Photonics Research Department at Bell Laboratories, Lucent Technologies, where he is working on novel MEMS based switching solutions using MEMS technology for optical communications.
Dr. Marom received the IEEE Lasers and Electro-Optics Society best student paper award in 1999 for his work describing instantaneous time reversal of complex amplitude ultrafast waveforms.View more
Lucent Technologies, Bell Laboratories, Murray Hill, NJ, USA
Paul A. Busch received the B.S. degree in physics from Upsala College in 1972.
He then joined the Physical Research Laboratory at Bell Laboratories, Murray Hill, NJ. His work has included studies in condensed matter physics at ultralow temperatures and the mechanical testing of prototype MEMS devices.
Paul A. Busch received the B.S. degree in physics from Upsala College in 1972.
He then joined the Physical Research Laboratory at Bell Laboratories, Murray Hill, NJ. His work has included studies in condensed matter physics at ultralow temperatures and the mechanical testing of prototype MEMS devices.View more
Lucent Technologies, Bell Laboratories, Murray Hill, NJ, USA
Raymond A. Cirelli is currently a Senior Member of Technical Staff at Lucent Technologies, Bell Laboratories, Murray Hill, NJ. He has authored over 70 technical papers and has been awarded numerous patents in the field of optical lithography. He has made critical contributions to various aspects of deep-ultraviolet lithography in the areas of; off-axis illumination, reflectivity control, and proximity effect correction. The current emphasis of his work is in new lithography techniques for MEMS and optical waveguide research.
Raymond A. Cirelli is currently a Senior Member of Technical Staff at Lucent Technologies, Bell Laboratories, Murray Hill, NJ. He has authored over 70 technical papers and has been awarded numerous patents in the field of optical lithography. He has made critical contributions to various aspects of deep-ultraviolet lithography in the areas of; off-axis illumination, reflectivity control, and proximity effect correction. The current emphasis of his work is in new lithography techniques for MEMS and optical waveguide research.View more
Lucent Technologies, Bell Laboratories, Murray Hill, NJ, USA
J. Ashley Taylor received the Ph.D. degree physical chemistry at the University of Houston, TX, studying photoionization of gaseous molecules.
As a Postdoctoral Fellow, also at the University of Houston, he investigated the reactions of ions with surfaces. He then joined Perkin-Elmer, Physical Electronics Division conducting surface analysis (XPS and Auger) for many different applications. In 1984, he joined AT&T Bell Laboratories, Allentown, PA, where he conducted many different studies characterizing materials used for the manufacturing of integrated circuits. In 1994, he moved to Orlando, FL, to develop dielectric plasma etch processes for the VLSI Process Development Department. In 1997, he was assigned to SEMATECH in Austin, TX, as the Project Manager for the Damascene Dielectric Etch Project. During that time he established joint projects with various plasma etch vendors and negotiated the placement of plasma etch tools at SEMATECH for evaluation of etching low-k dielectric materials. In 1997, he returned to Orlando, FL, to continue his work in developing plasma etch processes for low-k dielectric materials, which was an important part in the development of the 0.13 \mu{\rm m} integrated-circuit technology. In 2002, he moved to Murray Hill, NJ, to work for Agere Systems and then for Lucent Technologies, Bell Laboratories, developing processes for deep silicon plasma etch for optical MEMS devices. Recently, he has been studying the interaction of liquids with nanotextured silicon surfaces. He has authored more than 30 publications dealing with materials characterization and plasma etch and has several patent applications pending.
J. Ashley Taylor received the Ph.D. degree physical chemistry at the University of Houston, TX, studying photoionization of gaseous molecules.
As a Postdoctoral Fellow, also at the University of Houston, he investigated the reactions of ions with surfaces. He then joined Perkin-Elmer, Physical Electronics Division conducting surface analysis (XPS and Auger) for many different applications. In 1984, he joined AT&T Bell Laboratories, Allentown, PA, where he conducted many different studies characterizing materials used for the manufacturing of integrated circuits. In 1994, he moved to Orlando, FL, to develop dielectric plasma etch processes for the VLSI Process Development Department. In 1997, he was assigned to SEMATECH in Austin, TX, as the Project Manager for the Damascene Dielectric Etch Project. During that time he established joint projects with various plasma etch vendors and negotiated the placement of plasma etch tools at SEMATECH for evaluation of etching low-k dielectric materials. In 1997, he returned to Orlando, FL, to continue his work in developing plasma etch processes for low-k dielectric materials, which was an important part in the development of the 0.13 \mu{\rm m} integrated-circuit technology. In 2002, he moved to Murray Hill, NJ, to work for Agere Systems and then for Lucent Technologies, Bell Laboratories, developing processes for deep silicon plasma etch for optical MEMS devices. Recently, he has been studying the interaction of liquids with nanotextured silicon surfaces. He has authored more than 30 publications dealing with materials characterization and plasma etch and has several patent applications pending.View more
Lucent Technologies, Bell Laboratories, Murray Hill, NJ, USA
Fred P. Klemens, photograph and biography not available at the time of publication.
Fred P. Klemens, photograph and biography not available at the time of publication.View more
Lucent Technologies, Bell Laboratories, Murray Hill, NJ, USA
Thomas W. Sorsch, photograph and biography not available at the time of publication.
Thomas W. Sorsch, photograph and biography not available at the time of publication.View more
Lucent Technologies, Bell Laboratories, Murray Hill, NJ, USA
John Eric Bower received the Ph.D. degree in physics from the Stevens Institute of Technology, Hoboken, NJ, in 1993.
Following the completion of his undergraduate physics degree at Pennsylvania State University, he was employed by Chemcut Corporation, Nuclide Corporation, Instruments SA, and Arthur D. Little, Inc., where he worked in a number of fields, including mass spectrometry, atomic emission spectroscopy, and Molecular Beam Epitaxy. He did graduate work at Pennsylvania State University and Northeastern University prior to coming to Bell Laboratories in 1985, where he has worked in the Atomic Cluster, Integrated Circuit, and Nanotechnology fields. He has authored or coauthored more than 50 publications and has two patents.
John Eric Bower received the Ph.D. degree in physics from the Stevens Institute of Technology, Hoboken, NJ, in 1993.
Following the completion of his undergraduate physics degree at Pennsylvania State University, he was employed by Chemcut Corporation, Nuclide Corporation, Instruments SA, and Arthur D. Little, Inc., where he worked in a number of fields, including mass spectrometry, atomic emission spectroscopy, and Molecular Beam Epitaxy. He did graduate work at Pennsylvania State University and Northeastern University prior to coming to Bell Laboratories in 1985, where he has worked in the Atomic Cluster, Integrated Circuit, and Nanotechnology fields. He has authored or coauthored more than 50 publications and has two patents.View more
Lucent Technologies, Bell Laboratories, Murray Hill, NJ, USA
Warren Y.-C. Lai (M'82) received the Ph.D. degree in physics from the California Institute of Technology, Pasadena, in 1980, working in low-temperature physics. He then joined Bell Laboratories, Murray Hill, NJ, doing research and development in silicon microelectronics technology, optical MEMS technology and nanotechnology. His work in silicon multilevel interconnect technology for CMOS covered Al multilevel interconnect (including CVD Al and laser planarization), CVD W plug, chemical mechanical planarization, Cu-dual damascene, low-k dielectric for IC, and high-k dielectric for embedded DRAM. In late 2000, his work extended to optical MEMS including SOI-based optical cross connect. Since mid-2002, he worked in nanofabrication research and helped to form the New Jersey Nanotechnology Consortium (NJNC).
Dr. Lai is a Distinguished Member of Technical Staff at Bell Laboratories. He is a Member of the APS and serves on the Program Committee of IEEE IITC (International Interconnect Technology Conference).
Warren Y.-C. Lai (M'82) received the Ph.D. degree in physics from the California Institute of Technology, Pasadena, in 1980, working in low-temperature physics. He then joined Bell Laboratories, Murray Hill, NJ, doing research and development in silicon microelectronics technology, optical MEMS technology and nanotechnology. His work in silicon multilevel interconnect technology for CMOS covered Al multilevel interconnect (including CVD Al and laser planarization), CVD W plug, chemical mechanical planarization, Cu-dual damascene, low-k dielectric for IC, and high-k dielectric for embedded DRAM. In late 2000, his work extended to optical MEMS including SOI-based optical cross connect. Since mid-2002, he worked in nanofabrication research and helped to form the New Jersey Nanotechnology Consortium (NJNC).
Dr. Lai is a Distinguished Member of Technical Staff at Bell Laboratories. He is a Member of the APS and serves on the Program Committee of IEEE IITC (International Interconnect Technology Conference).View more
MEMS R&D Group, Agere Systems, Berkeley Heights, NJ, USA
Hyongsok T. Soh (M'02) received the B.S. degree with distinction with a double major in mechanical engineering and materials science from Cornell University, Ithaca, NY, in 1992, and the M.S. and Ph.D. degrees in electrical engineering from Stanford University, Stanford, CA, in 1995 and 1999, respectively.
He served as the Technical Manager of MEMS device research group at Bell Laboratories and MEMS R&D group at Agere Systems before joining the University of California-Santa Barbara in 2003 as an Assistant Professor in Mechanical Engineering. His research interests include scanning probe devices and techniques, use of MEMS technology for nanometer scale detection and manipulation, and parallel operation of micromachined devices. He has (co)authored over 25 technical papers, 10 patents, and one book.
Dr. Soh is a Member of the American Society of Mechanical Engineers (ASME).
Hyongsok T. Soh (M'02) received the B.S. degree with distinction with a double major in mechanical engineering and materials science from Cornell University, Ithaca, NY, in 1992, and the M.S. and Ph.D. degrees in electrical engineering from Stanford University, Stanford, CA, in 1995 and 1999, respectively.
He served as the Technical Manager of MEMS device research group at Bell Laboratories and MEMS R&D group at Agere Systems before joining the University of California-Santa Barbara in 2003 as an Assistant Professor in Mechanical Engineering. His research interests include scanning probe devices and techniques, use of MEMS technology for nanometer scale detection and manipulation, and parallel operation of micromachined devices. He has (co)authored over 25 technical papers, 10 patents, and one book.
Dr. Soh is a Member of the American Society of Mechanical Engineers (ASME).View more
