Abstract:
Two separate schemes for bulk micromachining are presented together with experimental results on microfabricated cantilever beam structures indicating that conventional l...Show MoreMetadata
Abstract:
Two separate schemes for bulk micromachining are presented together with experimental results on microfabricated cantilever beam structures indicating that conventional lithography and wet etching techniques can be used to produce geometrically well-defined, high-strength GaAs elements (fracture limits>
Date of Conference: 11-14 February 1990
Date Added to IEEE Xplore: 06 August 2002
