Abstract:
Micro-cantilever device combined with interferometry ranging system, based on optical pressure, can convert the measurement of laser power to micro-displacement. The vibr...Show MoreMetadata
Abstract:
Micro-cantilever device combined with interferometry ranging system, based on optical pressure, can convert the measurement of laser power to micro-displacement. The vibration state of the device directly affects the measurement response time and displacement noise level. The structural parameters of the micro-cantilever device are designed and simulated to ensure the linearity and sensitivity. The glass plate and the micro-cantilever device are used to form a thin air gap, and the vibration characteristics of the cantilever are improved by adjusting the squeeze-film damping, which reduces the measurement response time from 20 s to less than 0.5 s. The vibration characteristics of the micro-cantilever are investigated with different damping coefficient, and the response time is further optimized to 74 ms with an average displacement noise level of 10 nm. The calibration of the elastic coefficient is completed by using standard weights. High-power laser repeatability experiments and single pulse tests are carried out.
Published in: IEEE Transactions on Instrumentation and Measurement ( Volume: 74)
Funding Agency:
Division of Optics, National Institute of Metrology, Beijing, China
Hong Yang (Student Member, IEEE) received the B.S. degree in electronic science and technology from Shandong University, Shandong, China, in 2021, and the M.S. degree in instrument science and technology from National Institute of Metrology, Beijing, China, in 2024.
During the graduate studies, she mainly studied in high power laser measurement with optical pressure method.
Hong Yang (Student Member, IEEE) received the B.S. degree in electronic science and technology from Shandong University, Shandong, China, in 2021, and the M.S. degree in instrument science and technology from National Institute of Metrology, Beijing, China, in 2024.
During the graduate studies, she mainly studied in high power laser measurement with optical pressure method.View more
Shanghai Institute of Microsystems and Information Technology, Institute of Electronics, Chinese Academy of Sciences, Shanghai, China
School of Microelectronics, Shanghai University, Shanghai, China
Yuqiang Hu received the B.S. degree from Hubei University of Technology, Wuhan, Hubei, China, in 2020. He is currently pursuing the Ph.D. degree with Shanghai University, Shanghai, China.
His current research interests include quantum sensing and fiber-optics micro-electro-mechanical system (MEMS) sensor system.
Yuqiang Hu received the B.S. degree from Hubei University of Technology, Wuhan, Hubei, China, in 2020. He is currently pursuing the Ph.D. degree with Shanghai University, Shanghai, China.
His current research interests include quantum sensing and fiber-optics micro-electro-mechanical system (MEMS) sensor system.View more
Department of Physics and Astronomy, University of Rochester, Rochester, NY, USA
Qihang Huang is currently pursuing the B.S. degree with the University of Rochester, Rochester, NY, USA.
His current research interests include optical physics and laser generator.
Qihang Huang is currently pursuing the B.S. degree with the University of Rochester, Rochester, NY, USA.
His current research interests include optical physics and laser generator.View more
Division of Optics, National Institute of Metrology, Beijing, China
Qing Sun received the Ph.D. degree in physics from the University of Science and Technology of China, Hefei, China, in 2009. He is currently the Vice Director of the Laser Radiometry Laboratory in Divsion of Optics, National Institute of Metrology, Beijing, China.
His current research interests include high-power laser measurement and optical metrology.
Qing Sun received the Ph.D. degree in physics from the University of Science and Technology of China, Hefei, China, in 2009. He is currently the Vice Director of the Laser Radiometry Laboratory in Divsion of Optics, National Institute of Metrology, Beijing, China.
His current research interests include high-power laser measurement and optical metrology.View more
State Key Laboratory of Transducer Technology, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai, China
Hao Chen received the Ph.D. degree from Nanjing University, Nanjing, Jiangsu, China, in 2012.
He is currently a Professor with Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai, China. His research interests include micro-electro-mechanical system (MEMS), quantum sensing, and fiber-optics MEMS sensor.
Hao Chen received the Ph.D. degree from Nanjing University, Nanjing, Jiangsu, China, in 2012.
He is currently a Professor with Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai, China. His research interests include micro-electro-mechanical system (MEMS), quantum sensing, and fiber-optics MEMS sensor.View more
State Key Laboratory of Transducer Technology, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai, China
Zhenyu Wu received the Ph.D. degree from Ulm University, Ulm, Germany, in 2011.
He is currently a Professor with Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai, China. His research interests include advanced micro/nano fabrication technology, optical micro-electro-mechanical system (MEMS) microsystems, and new sensors based on quantum effects.
Zhenyu Wu received the Ph.D. degree from Ulm University, Ulm, Germany, in 2011.
He is currently a Professor with Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai, China. His research interests include advanced micro/nano fabrication technology, optical micro-electro-mechanical system (MEMS) microsystems, and new sensors based on quantum effects.View more
Contents Division of Optics, National Institute of Metrology, Beijing, China
Hong Yang (Student Member, IEEE) received the B.S. degree in electronic science and technology from Shandong University, Shandong, China, in 2021, and the M.S. degree in instrument science and technology from National Institute of Metrology, Beijing, China, in 2024.
During the graduate studies, she mainly studied in high power laser measurement with optical pressure method.
Hong Yang (Student Member, IEEE) received the B.S. degree in electronic science and technology from Shandong University, Shandong, China, in 2021, and the M.S. degree in instrument science and technology from National Institute of Metrology, Beijing, China, in 2024.
During the graduate studies, she mainly studied in high power laser measurement with optical pressure method.View more
Shanghai Institute of Microsystems and Information Technology, Institute of Electronics, Chinese Academy of Sciences, Shanghai, China
School of Microelectronics, Shanghai University, Shanghai, China
Yuqiang Hu received the B.S. degree from Hubei University of Technology, Wuhan, Hubei, China, in 2020. He is currently pursuing the Ph.D. degree with Shanghai University, Shanghai, China.
His current research interests include quantum sensing and fiber-optics micro-electro-mechanical system (MEMS) sensor system.
Yuqiang Hu received the B.S. degree from Hubei University of Technology, Wuhan, Hubei, China, in 2020. He is currently pursuing the Ph.D. degree with Shanghai University, Shanghai, China.
His current research interests include quantum sensing and fiber-optics micro-electro-mechanical system (MEMS) sensor system.View more
Department of Physics and Astronomy, University of Rochester, Rochester, NY, USA
Qihang Huang is currently pursuing the B.S. degree with the University of Rochester, Rochester, NY, USA.
His current research interests include optical physics and laser generator.
Qihang Huang is currently pursuing the B.S. degree with the University of Rochester, Rochester, NY, USA.
His current research interests include optical physics and laser generator.View more
Division of Optics, National Institute of Metrology, Beijing, China
Qing Sun received the Ph.D. degree in physics from the University of Science and Technology of China, Hefei, China, in 2009. He is currently the Vice Director of the Laser Radiometry Laboratory in Divsion of Optics, National Institute of Metrology, Beijing, China.
His current research interests include high-power laser measurement and optical metrology.
Qing Sun received the Ph.D. degree in physics from the University of Science and Technology of China, Hefei, China, in 2009. He is currently the Vice Director of the Laser Radiometry Laboratory in Divsion of Optics, National Institute of Metrology, Beijing, China.
His current research interests include high-power laser measurement and optical metrology.View more
State Key Laboratory of Transducer Technology, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai, China
Hao Chen received the Ph.D. degree from Nanjing University, Nanjing, Jiangsu, China, in 2012.
He is currently a Professor with Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai, China. His research interests include micro-electro-mechanical system (MEMS), quantum sensing, and fiber-optics MEMS sensor.
Hao Chen received the Ph.D. degree from Nanjing University, Nanjing, Jiangsu, China, in 2012.
He is currently a Professor with Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai, China. His research interests include micro-electro-mechanical system (MEMS), quantum sensing, and fiber-optics MEMS sensor.View more
State Key Laboratory of Transducer Technology, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai, China
Zhenyu Wu received the Ph.D. degree from Ulm University, Ulm, Germany, in 2011.
He is currently a Professor with Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai, China. His research interests include advanced micro/nano fabrication technology, optical micro-electro-mechanical system (MEMS) microsystems, and new sensors based on quantum effects.
Zhenyu Wu received the Ph.D. degree from Ulm University, Ulm, Germany, in 2011.
He is currently a Professor with Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai, China. His research interests include advanced micro/nano fabrication technology, optical micro-electro-mechanical system (MEMS) microsystems, and new sensors based on quantum effects.View more
