Wide linear range fabric pressure sensors based on multiscale inorganic structures

Sensitivity and linearity are two extremely important performance parameters for pressure sensors. Superior sensitivity and outstanding linearity enable them to adapt to different application scenarios and accurately acquire pressure change. However, it is challenging for current piezoresistive pressure sensors to balance both of these performance aspects. This study proposes a fabric-based resistive pressure sensor with multi-scale structures. The constructed resistive pressure sensor exhibits exceptional linearity exceeding 99% within a detection range of 0-1 MPa. Compared to the reported piezoresistive pressure sensors with ultra-wide ranges, this sensor demonstrates higher sensitivity and a broader linear response range. In addition, this device exhibits excellent temperature tolerance. Our work will extend the application limits of sensors in fields such as health monitoring and diagnostics, wearable devices, and human-machine interaction.