Abstract:
This work gives a deeper insight in wet chemical removal of phosphorous-doped poly-silicon via both the batch cluster route with utilization of an organic additive as wel...Show MoreMetadata
Abstract:
This work gives a deeper insight in wet chemical removal of phosphorous-doped poly-silicon via both the batch cluster route with utilization of an organic additive as well as the route with inline removal and batch post-cleaning for manufacturing TOPCon solar cells. The first part of this work focuses on the features of the batch cluster additive for poly-Si removal regarding glass protection and etch rate increase. In the second part an analysis concerning batch cluster vs. inline poly-Si removal process will be given followed by an optimization of the post-clean process for the batch cluster route. A detailed study is done in the case of ex-situ n-doped layers with single slot LPCVD configuration where there is a complete parasitic deposition on the front side. A sufficient poly-Si removal is a key factor in order to get a low Jrev,2 which prevents damage to the modules by excessive heat generation (e.g. hot-spots). Finally a cost-ofownership for different scenarios of the two poly-Si removal routes will be presented.
Published in: 2024 IEEE 52nd Photovoltaic Specialist Conference (PVSC)
Date of Conference: 09-14 June 2024
Date Added to IEEE Xplore: 15 November 2024
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RENA Technologies GmbH, Gütenbach, Germany
RENA Technologies GmbH, Gütenbach, Germany
RENA Technologies GmbH, Gütenbach, Germany
Fraunhofer Institute for Solar Energy Systems ISE, Freiburg, Germany
Fraunhofer Institute for Solar Energy Systems ISE, Freiburg, Germany
Fraunhofer Institute for Solar Energy Systems ISE, Freiburg, Germany
RENA Technologies GmbH, Gütenbach, Germany
RENA Technologies GmbH, Gütenbach, Germany
RENA Technologies GmbH, Gütenbach, Germany
RENA Technologies GmbH, Gütenbach, Germany
Fraunhofer Institute for Solar Energy Systems ISE, Freiburg, Germany
Fraunhofer Institute for Solar Energy Systems ISE, Freiburg, Germany
Fraunhofer Institute for Solar Energy Systems ISE, Freiburg, Germany
RENA Technologies GmbH, Gütenbach, Germany