Abstract:
This study presents recent advances in high-aspect-ratio Deep Reactive Ion Etching (DRIE) of bulk 4H-SiC and thick 4H-SiC on Insulator (SiCOI) substrates at the wafer lev...Show MoreMetadata
Abstract:
This study presents recent advances in high-aspect-ratio Deep Reactive Ion Etching (DRIE) of bulk 4H-SiC and thick 4H-SiC on Insulator (SiCOI) substrates at the wafer level. Utilizing an electroplated nickel mask, we successfully achieved high aspect ratios ranging from 10:1 to 18:1 in deep trenches with critical dimensions in the range of 1- 10~\mu m on the wafer. Trenches having an opening of \sim ~4~\mu m were etched to greater than the target depth of 45~\mu m, with a tapering angle of 88.5° and smooth sidewalls (roughness <200nm), achieving trench depth uniformity of ~2% ( \pm 0.85~\mu m) across the wafer. These results facilitated batch fabrication of capacitive 4H-SiC bulk acoustic wave disk resonators with high quality factor (Q) approaching 5 million at 3MHz. These achievements in high-aspect-ratio DRIE of 4H-SiC at the wafer level mark a significant stride towards enabling volume manufacturing of ultra-high Q SiC microresonators.[2024-0119]
Published in: Journal of Microelectromechanical Systems ( Volume: 33, Issue: 6, December 2024)
Funding Agency:
Georgia Institute of Technology, Atlanta, GA, USA
Ningxin Li received the B.S. degree in physics from Henan Normal University, China, in 2019, and the Ph.D. degree in physics from Georgia State University, Atlanta, GA, USA, in 2023. She is currently a Post-Doctoral Fellow of electrical engineering with Georgia Institute of Technology, Atlanta. Her research interests include 4H-SiC material properties explorations and high-performance 4H-SiC MEMS device fabrications.
Ningxin Li received the B.S. degree in physics from Henan Normal University, China, in 2019, and the Ph.D. degree in physics from Georgia State University, Atlanta, GA, USA, in 2023. She is currently a Post-Doctoral Fellow of electrical engineering with Georgia Institute of Technology, Atlanta. Her research interests include 4H-SiC material properties explorations and high-performance 4H-SiC MEMS device fabrications.View more
StethX Microsystem, Atlanta, GA, USA
Zhenming Liu received the B.S. degree from Rensselaer Polytechnic Institute in 2018 and the Ph.D. degree from Georgia Institute of Technology in 2023. He is currently the MEMS Engineer with StethX Microsystem, Atlanta, GA, USA. His research interests include 4H-SiC MEMS resonators/gyroscope design and characterizations.
Zhenming Liu received the B.S. degree from Rensselaer Polytechnic Institute in 2018 and the Ph.D. degree from Georgia Institute of Technology in 2023. He is currently the MEMS Engineer with StethX Microsystem, Atlanta, GA, USA. His research interests include 4H-SiC MEMS resonators/gyroscope design and characterizations.View more
Fujifilm Dimatix Inc, Santa Clara, CA, USA
Ardalan Lotfi received the B.S. degree in electrical engineering from the University of Isfahan in 2012, the M.S. degree in nanotechnology for ICTs from the Polytechnic University of Turin in 2015, and the Ph.D. degree in mechanical engineering from Georgia Institute of Technology in 2021. He joined the Prof. Ayazi’s Group, ECE Department, Georgia Tech, as a Research Engineer II, to further pursue his research career. He ...Show More
Ardalan Lotfi received the B.S. degree in electrical engineering from the University of Isfahan in 2012, the M.S. degree in nanotechnology for ICTs from the Polytechnic University of Turin in 2015, and the Ph.D. degree in mechanical engineering from Georgia Institute of Technology in 2021. He joined the Prof. Ayazi’s Group, ECE Department, Georgia Tech, as a Research Engineer II, to further pursue his research career. He ...View more
Georgia Institute of Technology, Atlanta, GA, USA
Xinyu Jiang received the Bachelor of Science degree from Rensselaer Polytechnic Institute in 2022. He is currently pursuing the Doctor of Philosophy degree in electronic and computer engineering with Georgia Institute of Technology. He joined IMEMS in 2023. His research interests include high-performance MEMS resonators in inertial sensing applications.
Xinyu Jiang received the Bachelor of Science degree from Rensselaer Polytechnic Institute in 2022. He is currently pursuing the Doctor of Philosophy degree in electronic and computer engineering with Georgia Institute of Technology. He joined IMEMS in 2023. His research interests include high-performance MEMS resonators in inertial sensing applications.View more
Georgia Institute of Technology, Atlanta, GA, USA
Emma (Yaoyao) Long received the Bachelor of Science degree (cum laude) in materials science and engineering from The Ohio State University in May 2019, the Master of Science degree in materials science and engineering from Cornell University in August 2021, and the Ph.D. degree in electronic and computer engineering from Georgia Institution of Technology.
Emma (Yaoyao) Long received the Bachelor of Science degree (cum laude) in materials science and engineering from The Ohio State University in May 2019, the Master of Science degree in materials science and engineering from Cornell University in August 2021, and the Ph.D. degree in electronic and computer engineering from Georgia Institution of Technology.View more
Georgia Institute of Technology, Atlanta, GA, USA
Shubham S. Sahasrabudhe received the Bachelor of Technology degree in electrical engineering from the College of Engineering, Pune, in 2020. He is currently pursuing the master’s degree in electrical and computer engineering with Georgia Institute of Technology. He has been a part of IMEMS since 2023. His research interests include high-performance MEMS resonator-based frequency references.
Shubham S. Sahasrabudhe received the Bachelor of Technology degree in electrical engineering from the College of Engineering, Pune, in 2020. He is currently pursuing the master’s degree in electrical and computer engineering with Georgia Institute of Technology. He has been a part of IMEMS since 2023. His research interests include high-performance MEMS resonator-based frequency references.View more
KLA Corporation, Newport, U.K.
Chris Bolton received the B.Sc. degree (Hons.) in physics and the Ph.D. degree in nanotechnology for work in silicon DRIE manufacture of hollow microneedles from Swansea University in 2023. He joined SPTS Technologies Ltd., in 2016. He was a Senior Process Engineer with KLA. He is currently with the Research and Development Consortia Group, Industry and Customer Collaboration Team, KLA, and develops innovative plasma etch...Show More
Chris Bolton received the B.Sc. degree (Hons.) in physics and the Ph.D. degree in nanotechnology for work in silicon DRIE manufacture of hollow microneedles from Swansea University in 2023. He joined SPTS Technologies Ltd., in 2016. He was a Senior Process Engineer with KLA. He is currently with the Research and Development Consortia Group, Industry and Customer Collaboration Team, KLA, and develops innovative plasma etch...View more
KLA Corporation, Newport, U.K.
Huma Ashraf received the degree in engineering from Cambridge University and the Ph.D. degree in chemistry from Imperial College. In 1993, she joined Surface Technology Systems as a Process Engineer and was involved in the early pioneering development of silicon DRIE and subsequent equipment development and contributed to several technical articles and patents, over many years. Currently, she leads the Research and Develo...Show More
Huma Ashraf received the degree in engineering from Cambridge University and the Ph.D. degree in chemistry from Imperial College. In 1993, she joined Surface Technology Systems as a Process Engineer and was involved in the early pioneering development of silicon DRIE and subsequent equipment development and contributed to several technical articles and patents, over many years. Currently, she leads the Research and Develo...View more
Georgia Institute of Technology, Atlanta, GA, USA
Farrokh Ayazi (Fellow, IEEE) received the B.S. degree in electrical engineering from the University of Tehran, Iran, in 1994, and the M.S. and Ph.D. degrees in electrical engineering from the University of Michigan, Ann Arbor, in 1997 and 2000, respectively. He is currently a Regents Entrepreneur and a Ken Byers Professor of microsystems with Georgia Institute of Technology, Atlanta, GA, USA. He is also the Founder and th...Show More
Farrokh Ayazi (Fellow, IEEE) received the B.S. degree in electrical engineering from the University of Tehran, Iran, in 1994, and the M.S. and Ph.D. degrees in electrical engineering from the University of Michigan, Ann Arbor, in 1997 and 2000, respectively. He is currently a Regents Entrepreneur and a Ken Byers Professor of microsystems with Georgia Institute of Technology, Atlanta, GA, USA. He is also the Founder and th...View more
Contents Georgia Institute of Technology, Atlanta, GA, USA
Ningxin Li received the B.S. degree in physics from Henan Normal University, China, in 2019, and the Ph.D. degree in physics from Georgia State University, Atlanta, GA, USA, in 2023. She is currently a Post-Doctoral Fellow of electrical engineering with Georgia Institute of Technology, Atlanta. Her research interests include 4H-SiC material properties explorations and high-performance 4H-SiC MEMS device fabrications.
Ningxin Li received the B.S. degree in physics from Henan Normal University, China, in 2019, and the Ph.D. degree in physics from Georgia State University, Atlanta, GA, USA, in 2023. She is currently a Post-Doctoral Fellow of electrical engineering with Georgia Institute of Technology, Atlanta. Her research interests include 4H-SiC material properties explorations and high-performance 4H-SiC MEMS device fabrications.View more
StethX Microsystem, Atlanta, GA, USA
Zhenming Liu received the B.S. degree from Rensselaer Polytechnic Institute in 2018 and the Ph.D. degree from Georgia Institute of Technology in 2023. He is currently the MEMS Engineer with StethX Microsystem, Atlanta, GA, USA. His research interests include 4H-SiC MEMS resonators/gyroscope design and characterizations.
Zhenming Liu received the B.S. degree from Rensselaer Polytechnic Institute in 2018 and the Ph.D. degree from Georgia Institute of Technology in 2023. He is currently the MEMS Engineer with StethX Microsystem, Atlanta, GA, USA. His research interests include 4H-SiC MEMS resonators/gyroscope design and characterizations.View more
Fujifilm Dimatix Inc, Santa Clara, CA, USA
Ardalan Lotfi received the B.S. degree in electrical engineering from the University of Isfahan in 2012, the M.S. degree in nanotechnology for ICTs from the Polytechnic University of Turin in 2015, and the Ph.D. degree in mechanical engineering from Georgia Institute of Technology in 2021. He joined the Prof. Ayazi’s Group, ECE Department, Georgia Tech, as a Research Engineer II, to further pursue his research career. He is currently a Senior MEMS Development Engineer with Fujifilm Dimatix Inc., advancing piezo MEMS inkjet technology. His research interests include micro gas chromatography, MEMS for harsh environments, and sensor and actuator development.
Ardalan Lotfi received the B.S. degree in electrical engineering from the University of Isfahan in 2012, the M.S. degree in nanotechnology for ICTs from the Polytechnic University of Turin in 2015, and the Ph.D. degree in mechanical engineering from Georgia Institute of Technology in 2021. He joined the Prof. Ayazi’s Group, ECE Department, Georgia Tech, as a Research Engineer II, to further pursue his research career. He is currently a Senior MEMS Development Engineer with Fujifilm Dimatix Inc., advancing piezo MEMS inkjet technology. His research interests include micro gas chromatography, MEMS for harsh environments, and sensor and actuator development.View more
Georgia Institute of Technology, Atlanta, GA, USA
Xinyu Jiang received the Bachelor of Science degree from Rensselaer Polytechnic Institute in 2022. He is currently pursuing the Doctor of Philosophy degree in electronic and computer engineering with Georgia Institute of Technology. He joined IMEMS in 2023. His research interests include high-performance MEMS resonators in inertial sensing applications.
Xinyu Jiang received the Bachelor of Science degree from Rensselaer Polytechnic Institute in 2022. He is currently pursuing the Doctor of Philosophy degree in electronic and computer engineering with Georgia Institute of Technology. He joined IMEMS in 2023. His research interests include high-performance MEMS resonators in inertial sensing applications.View more
Georgia Institute of Technology, Atlanta, GA, USA
Emma (Yaoyao) Long received the Bachelor of Science degree (cum laude) in materials science and engineering from The Ohio State University in May 2019, the Master of Science degree in materials science and engineering from Cornell University in August 2021, and the Ph.D. degree in electronic and computer engineering from Georgia Institution of Technology.
Emma (Yaoyao) Long received the Bachelor of Science degree (cum laude) in materials science and engineering from The Ohio State University in May 2019, the Master of Science degree in materials science and engineering from Cornell University in August 2021, and the Ph.D. degree in electronic and computer engineering from Georgia Institution of Technology.View more
Georgia Institute of Technology, Atlanta, GA, USA
Shubham S. Sahasrabudhe received the Bachelor of Technology degree in electrical engineering from the College of Engineering, Pune, in 2020. He is currently pursuing the master’s degree in electrical and computer engineering with Georgia Institute of Technology. He has been a part of IMEMS since 2023. His research interests include high-performance MEMS resonator-based frequency references.
Shubham S. Sahasrabudhe received the Bachelor of Technology degree in electrical engineering from the College of Engineering, Pune, in 2020. He is currently pursuing the master’s degree in electrical and computer engineering with Georgia Institute of Technology. He has been a part of IMEMS since 2023. His research interests include high-performance MEMS resonator-based frequency references.View more
KLA Corporation, Newport, U.K.
Chris Bolton received the B.Sc. degree (Hons.) in physics and the Ph.D. degree in nanotechnology for work in silicon DRIE manufacture of hollow microneedles from Swansea University in 2023. He joined SPTS Technologies Ltd., in 2016. He was a Senior Process Engineer with KLA. He is currently with the Research and Development Consortia Group, Industry and Customer Collaboration Team, KLA, and develops innovative plasma etch solutions for a wide variety of materials and applications.
Chris Bolton received the B.Sc. degree (Hons.) in physics and the Ph.D. degree in nanotechnology for work in silicon DRIE manufacture of hollow microneedles from Swansea University in 2023. He joined SPTS Technologies Ltd., in 2016. He was a Senior Process Engineer with KLA. He is currently with the Research and Development Consortia Group, Industry and Customer Collaboration Team, KLA, and develops innovative plasma etch solutions for a wide variety of materials and applications.View more
KLA Corporation, Newport, U.K.
Huma Ashraf received the degree in engineering from Cambridge University and the Ph.D. degree in chemistry from Imperial College. In 1993, she joined Surface Technology Systems as a Process Engineer and was involved in the early pioneering development of silicon DRIE and subsequent equipment development and contributed to several technical articles and patents, over many years. Currently, she leads the Research and Development Consortia, Industry and Customer Collaboration Team, KLA, and has an Honorary Professorship with Swansea University.
Huma Ashraf received the degree in engineering from Cambridge University and the Ph.D. degree in chemistry from Imperial College. In 1993, she joined Surface Technology Systems as a Process Engineer and was involved in the early pioneering development of silicon DRIE and subsequent equipment development and contributed to several technical articles and patents, over many years. Currently, she leads the Research and Development Consortia, Industry and Customer Collaboration Team, KLA, and has an Honorary Professorship with Swansea University.View more
Georgia Institute of Technology, Atlanta, GA, USA
Farrokh Ayazi (Fellow, IEEE) received the B.S. degree in electrical engineering from the University of Tehran, Iran, in 1994, and the M.S. and Ph.D. degrees in electrical engineering from the University of Michigan, Ann Arbor, in 1997 and 2000, respectively. He is currently a Regents Entrepreneur and a Ken Byers Professor of microsystems with Georgia Institute of Technology, Atlanta, GA, USA. He is also the Founder and the Managing Director of StethX Microsystems, a spin-out of his research laboratory that commercializes wearable seismic patches for cardiopulmonary applications. Previously, he was the Co-Founder and the CTO of Qualtre, another spin-out of his research laboratory that commercialized bulk acoustic-wave silicon gyroscopes for precision applications, which was acquired by Panasonic in 2016. He holds 70 patents and has authored over 300 refereed technical and scientific articles. His research interests include integrated micro/nano-electro-mechanical systems, with a focus on acoustic resonators and inertial sensors. He is a fellow of the National Academy of Inventors (NAI). He was the General Chair of the IEEE Micro-Electro-Mechanical-Systems Conference, San Francisco, CA, USA, in 2014.
Farrokh Ayazi (Fellow, IEEE) received the B.S. degree in electrical engineering from the University of Tehran, Iran, in 1994, and the M.S. and Ph.D. degrees in electrical engineering from the University of Michigan, Ann Arbor, in 1997 and 2000, respectively. He is currently a Regents Entrepreneur and a Ken Byers Professor of microsystems with Georgia Institute of Technology, Atlanta, GA, USA. He is also the Founder and the Managing Director of StethX Microsystems, a spin-out of his research laboratory that commercializes wearable seismic patches for cardiopulmonary applications. Previously, he was the Co-Founder and the CTO of Qualtre, another spin-out of his research laboratory that commercialized bulk acoustic-wave silicon gyroscopes for precision applications, which was acquired by Panasonic in 2016. He holds 70 patents and has authored over 300 refereed technical and scientific articles. His research interests include integrated micro/nano-electro-mechanical systems, with a focus on acoustic resonators and inertial sensors. He is a fellow of the National Academy of Inventors (NAI). He was the General Chair of the IEEE Micro-Electro-Mechanical-Systems Conference, San Francisco, CA, USA, in 2014.View more
